Biological sensor based on periodical nano medium particles and preparation method of sensor

A biosensor and medium particle technology, applied in the field of biosensors, can solve the problems of bulky, difficult to integrate and carry, and achieve the effect of simple manufacturing process

Inactive Publication Date: 2013-03-06
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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  • Abstract
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  • Biological sensor based on periodical nano medium particles and preparation method of sensor
  • Biological sensor based on periodical nano medium particles and preparation method of sensor
  • Biological sensor based on periodical nano medium particles and preparation method of sensor

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[0024] The principles and features of the present invention are described below in conjunction with the accompanying drawings, and the examples given are only used to explain the present invention, and are not intended to limit the scope of the present invention.

[0025] Such as figure 1 As shown, the biosensor based on the surface plasmon resonance of periodic nano-dielectric particles includes a substrate 1 , a noble metal film 2 and a plurality of nano-medium particles 3 arranged periodically. The noble metal thin film 2 is disposed on the substrate 1 , and the plurality of nano-media particles 3 arranged periodically are disposed on the noble metal thin film 2 . The substrate 1 can be fused silica, ordinary glass, plexiglass or silicon, and can also be an organic or inorganic self-supporting film including polyimide film, silicon carbide film, silicon nitride film and the like. The composition of the noble metal thin film may be gold, silver, aluminum and other metals. ...

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Abstract

The invention relates to a biological sensor based on periodical nano medium particles and a preparation method of the sensor. The biological sensor is a surface plasma resonance biological sensor and comprises a substrate, a noble metal thin film and a plurality of periodically arranged nano medium particles, wherein the noble metal thin film is arranged on the substrate; the plurality of periodically arranged nano medium particles are arranged on the noble metal thin film; and the plurality of nano medium particles are in bidimensional array-type periodical arrangement and are used for supplying wave vector matching required for exciting surface plasmas. By the biological sensor based on the periodical nano medium particles, the shortcoming of large volume of the conventional biological sensor is overcome; the wave vector matching required for exciting the surface plasmas can be provided; all manufacturing processes are compatible with a standard semiconductor process; the manufacturing processes are simple; the size is relatively small; and the biological sensor is easy to integrate.

Description

technical field [0001] The invention relates to a biosensor, in particular to a biosensor based on periodic nano medium particles and a preparation method thereof. Background technique [0002] A surface plasmon is an electromagnetic wave propagating at the interface between a metal and a medium, generated by the interaction of an incident light field with electrons on the metal surface. The resonance condition of surface plasmons is very sensitive to small changes in the refractive index of the metal surface medium. Surface plasmon resonance biosensors are a major tool for characterizing biomolecular interactions. The basic principle of the surface plasmon resonance biosensor is to detect the refractive index of the analyte on the surface by recording the change of the surface plasmon resonance angle or resonance wavelength. Compared with other types of biosensors, biosensors based on surface plasmon resonance identify samples by detecting changes in the refractive index...

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Application Information

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IPC IPC(8): G01N21/41
Inventor 李海亮史丽娜朱效立李冬梅谢常青刘明
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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