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Electric fuse structure

An electric fuse, fuse technology, applied in circuits, electrical components, electric solid devices, etc., can solve problems such as diode chip defects, and achieve the effect of increasing the range of fusing current

Active Publication Date: 2016-12-14
UNITED MICROELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For example, the failure of a single metal connection, diode or transistor, etc. can lead to the defect of the entire chip

Method used

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  • Electric fuse structure
  • Electric fuse structure
  • Electric fuse structure

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Embodiment Construction

[0027] The opening mechanism of the general electric fuse is as follows: figure 1 As shown: the cathode of the electric fuse structure 1 is electrically connected with the blowing device (blowing device), such as the drain of the transistor 2 . A voltage Vfs is applied to the anode of the electric fuse structure 1, a voltage Vg is applied to the gate of the transistor 2, a voltage Vd is applied to the drain of the transistor 2, and the source of the transistor 2 is grounded. Current (I) flows from the anode of the electric fuse structure 1 to the cathode of the electric fuse structure 1, and the electron flow (e - ) flows from the cathode of the electric fuse structure 1 to the anode of the electric fuse structure 1. The current for fusing the electric fuse structure 1 has a preferred fusing current range. When the current is too low, the resulting resistance is too low, resulting in incomplete electromigration and unable to blow the electric fuse structure 1; when the curren...

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PUM

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Abstract

The invention discloses an electric fuse structure. The electric fuse structure includes an upper conductive pattern, a lower conductive pattern, and a via hole conductive layer. The upper conductive pattern includes an upper fuse body and an upper fuse extension; and the lower conductive pattern includes a lower fuse body and a lower fuse extension, and the lower fuse extension corresponds to the upper fuse extension. . In addition, the via conductive layer is disposed between the upper fuse extension and the lower fuse extension, and is electrically connected to the upper fuse extension and the lower fuse extension.

Description

technical field [0001] The present invention relates to an electric fuse (e-fuse) structure, in particular to an electric fuse structure capable of increasing the blowing window of the electric fuse. Background technique [0002] With the miniaturization and increase in complexity of semiconductor processes, semiconductor devices become more susceptible to various defects. For example, the failure of a single metal connection, diode or transistor, etc. may lead to the defect of the entire chip. In order to solve the above-mentioned problems, the known technology often forms some fusible connection lines in the integrated circuit, that is, fuses (fuse), so as to ensure the availability of the integrated circuit. [0003] Generally speaking, the fuse is electrically connected to a redundancy circuit in an integrated circuit, and once a defective part of the circuit is detected, these connecting wires are used to repair or replace the detected defective circuit. In addition, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L23/525
Inventor 吴贵盛曾靖翔翁彰键
Owner UNITED MICROELECTRONICS CORP