Capacitive accelerometer

An accelerometer, capacitive technology, used in the measurement of acceleration, multi-dimensional acceleration measurement, speed/acceleration/shock measurement, etc., can solve the problem of large overall size of the accelerometer

Active Publication Date: 2013-04-03
RICHWAVE TECH CORP
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  • Abstract
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  • Application Information

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Problems solved by technology

Although this configuration can prevent the linearity and sensitivity of each axis from being affected by other axes in the acceleration sensing, bu

Method used

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  • Capacitive accelerometer
  • Capacitive accelerometer
  • Capacitive accelerometer

Examples

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Embodiment Construction

[0043] Please refer to figure 1 , figure 1 It is a top view of a capacitive accelerometer 10 proposed according to a first embodiment of the present invention. As shown in FIG. 1, the capacitive accelerometer 10 includes a substrate 12, a first semiconductor structure layer 14 and a first Two semiconductor structure layers 16 . The substrate 12 can be made of an insulating material (such as glass or ceramics) for loading the first semiconductor structure layer 14 and the second semiconductor structure layer 16 thereon, and the second semiconductor structure layer 16 is located on one side of the first semiconductor structure layer 14 , the structural design of the first semiconductor structure layer 14 and the second semiconductor structure layer 16 will be described respectively below.

[0044] First, in terms of the structural design of the first semiconductor structure layer 14, the first semiconductor structure layer 14 includes a first mass block 18, at least one first ...

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Abstract

A capacitive accelerometer includes a substrate and a first semiconductor layer. The first semiconductor layer is disposed on the substrate and includes a first mass, two first support bases, a second support base, two first elastic members, a second elastic member, and first and second comb capacitor sets. The first and second support bases are disposed at positions corresponding to first and second axes respectively. Each first elastic members is respectively connected to the first mass and the corresponding first support base in a manner of bending back and forth perpendicular to the first axis, and the bended times of the two elastic members are different with each other. The second elastic member is connected to the first mass and the second support base in a manner of bending back and forth perpendicular to the second axis. The first and second comb capacitor sets are disposed at positions corresponding to the second and first axes respectively and connected to the first mass. The first axis is perpendicular to the second axis. Accordingly, the size of the capacitive accelerometer can be further decreased.

Description

technical field [0001] The invention relates to an accelerometer, in particular to a capacitive accelerometer. Background technique [0002] Generally speaking, the traditional three-axis capacitive accelerometer adopts a capacitive sensing structure design with independent sensing axes, that is, the masses used to sense the acceleration of the X-axis, Y-axis, and Z-axis are independent of their related sensing electrode components. Set to achieve the purpose of three-axis independent sensing. Although this configuration can prevent the linearity and sensitivity of each axis from being affected by other axes in the acceleration sensing, but in order to achieve the purpose of reducing mechanical noise at the same time, the overall size of the accelerometer is often too large. question. Therefore, how to further reduce its overall size and improve its sensitivity and linearity is one of the important issues in the structural design of capacitive accelerometers. Contents of...

Claims

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Application Information

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IPC IPC(8): G01P15/125G01P15/18
CPCG01P15/125G01P15/18G01P2015/082G01P2015/0831
Inventor 沈靖凯
Owner RICHWAVE TECH CORP
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