Diagnosis method of low temperature plasma density parameter at atmospheric pressure

Abstract

The invention relates to a diagnosis method of a low temperature plasma density parameter at an atmospheric pressure, and belongs to the field of plasma. A series of problems that the traditional diagnosis method of plasma has low precision, poor efficiency, higher environmental requirements, short service life, higher cost and the like in the measuring process are solved. The method comprises the following steps that: 1. the gas pressure drop Ug(t) in a discharge channel is detected by a voltage transformer; 2. the conduction current jc (x, t) is detected by a current transformer; 3. the total discharge current JT is obtained according to the gas pressure drop Ug (t) in the discharge channel obtained from a step 1 and the conduction current jc (x, t); 4. the plasma density n (t) is obtained according t the total discharge current jT obtained from a step 3; and 5. the discrete plasma density nm +1 (t) is obtained so as to achieve the diagnosis of the plasma density parameter.

Description

technical field [0001] The invention relates to a method for diagnosing density parameters of low-temperature plasma under normal pressure, belonging to the field of plasma. Background technique [0002] In recent years, the low-temperature plasma generated based on the principle of dielectric barrier discharge (DBD) has been widely used in many disciplines such as materials, microelectronics, chemical industry, machinery and environmental protection, and has formed a new industry - the plasma industry. For example, in materials science, technologies such as plasma physical vapor deposition (PVD), enhanced chemical vapor deposition (PECVD) and plasma source ion implantation (PSII) are usually used to prepare some luminescent, photoelectric, microelectronics, corrosion-resistant and wear-resistant materials. New multifunctional film materials such as superhard. Using plasma to modify the surface of materials to improve the wettability, water absorption, dyeability, adhesion ...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve a series of problems such as low accuracy, poor efficiency, high environmental requirements, short service life, and relatively expensive cost in the measurement process of the existing plasma diagnostic method, and to provide a low-temperature plasma diagnostic method under normal pressure. Diagnosis Method of Plasma Density Parameters

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