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Switchable Filters and Design Structures

A filter structure and filter technology, applied in piezoelectric devices/electrostrictive devices, electrical components, special data processing applications, etc., can solve difficult problems such as SAW filter programming or tuning

Inactive Publication Date: 2016-03-30
GLOBALFOUNDRIES INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, programming or tuning of SAW filters has been found to be difficult

Method used

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  • Switchable Filters and Design Structures
  • Switchable Filters and Design Structures
  • Switchable Filters and Design Structures

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Embodiment Construction

[0017] The present invention relates to semiconductor structures and fabrication methods, and more particularly, to switchable and / or tunable filters, fabrication methods, and design structures. In an embodiment, the switchable and / or tunable filter structure of the present invention comprises, for example, a Surface Acoustic Wave (SAW) filter. In an embodiment, the filter structure of the present invention is switchable between an "on" state and an "off" state using, for example, a movable ground electrode. Alternatively, in multiple SAW filtering applications, the movable ground electrode can tune the filter to the desired frequency by "turning off" or "turning on" the selected SAW filter.

[0018] More specifically, the SAW filter of the present invention includes interdigital or interdigitated electrodes formed on a piezoelectric substrate. The piezoelectric material may be, for example, aluminum nitride or zinc oxide; however, other piezoelectric materials are also conte...

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Abstract

Switchable and / or tunable filters, fabrication methods and design structures are disclosed herein. The method of forming the filter includes forming at least one piezoelectric filter structure including a plurality of electrodes formed on a piezoelectric substrate. The method also includes forming a fixed electrode having a plurality of fingers on the piezoelectric substrate. The method also includes forming a movable electrode having a plurality of fingers over the piezoelectric substrate. The method also includes forming an actuator aligned with one or more of the plurality of fingers of the movable electrode.

Description

technical field [0001] The present invention relates to semiconductor structures and fabrication methods, and more particularly, to switchable and / or tunable filters, fabrication methods, and design structures. Background technique [0002] SAW (Surface Acoustic Wave) filters play an important role in telecommunications. For example, SAW filters are widely used as bandpass and spectrum shaping filters in mobile and wireless applications. Other applications for SAW filters include wide area network (WAN), wireless local area network (WLAN) communications, cordless phones, pagers, and satellite communications. SAW filters are superior to conventional LC filters because they are smaller, cheaper and more versatile, making them ideal for telecom applications. [0003] In a SAW filter, an electrical signal is converted into a mechanical wave in a device constructed of piezoelectric crystals or ceramics. The wave is delayed due to propagation through the device before being con...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H03H9/64H10N30/87H10N30/00
CPCH03H9/6403H03H9/64Y10T29/42Y10T29/49005Y10T29/49126Y10T29/49147Y10T29/49155H03H3/08H03H9/145H03H9/6413H03H2003/0071H03H2009/02299H03H9/13H03H9/02543G06F30/398
Inventor J·W·阿基森P·坎德拉T·J·邓巴J·P·甘比诺M·D·贾菲A·K·斯塔珀R·L·沃尔夫
Owner GLOBALFOUNDRIES INC