Method and device for precise gas control in inner chamber of optical system
An optical system and control device technology, applied in the direction of fluid pressure control without auxiliary power, etc., can solve the problems of inability to meet the requirements, poor adaptability of the optical system, etc., and achieve the effect of suppressing secondary pollution, simple structure, and good pressure stability.
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no. 1 approach
[0039] see figure 1 , figure 1 Shown is a schematic diagram of the structure of the imaging device and its internal chamber of the optical system. The imaging device includes an optical system 100 , and an object plane 200 and an image plane 300 respectively disposed on both sides of the optical system 100 . The light path 400 enters the optical system 100 after passing through the object plane 200 , and is projected onto the image plane 300 after being processed inside the optical system 100 . The inner chamber of the optical system 100 is filled with the cleaning gas, and the uniform flow of the gas can enhance the cleaning effect. In order to realize gas flow, an air inlet 101 and an air outlet 102 are respectively provided at both ends of the optical system 100 . In order to achieve the uniformity of the input air flow, an air intake flow equalization component 103 is provided in the inner chamber on the side of the air inlet 101 of the optical system 100 . The intak...
no. 2 approach
[0070] The difference between the second embodiment and the first embodiment is that the inner chamber of the optical system involved in the second embodiment requires absolute pressure control, and the first gas control circuit designed by the above method needs to be adjusted accordingly. The same numbers are used for the same parts of the second embodiment and the first embodiment, and the same parts will not be repeated.
[0071] see Figure 6 , Figure 6 Shown is a schematic diagram of the structure of the precise gas control device in the inner chamber of the optical system with the function of absolute pressure control. The precision gas control device in the inner chamber of the optical system with absolute pressure control function includes an optical system 100, a second gas control circuit 550 and a control system. The second gas control circuit 550 includes two parts: a gas supply circuit and an exhaust circuit. The air supply circuit includes control devices an...
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