Substrate cleaning device

A technology for cleaning devices and substrates, applied in cleaning methods and appliances, cleaning methods using liquids, chemical instruments and methods, etc., can solve the problems of poor cleaning effect and affect the cleaning effect of substrates, and achieve the effect of improving the cleaning effect

Active Publication Date: 2013-09-25
HEFEI BOE OPTOELECTRONICS TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this cleaning method can directly spray less liquid into the channels, grooves or slits on the surface of the substrate, and the cleaning effect on the residual impurities in the channels, grooves or slits of the substrate is poor, thus affecting the The overall cleaning effect of the substrate

Method used

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Embodiment Construction

[0053] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0054] Please refer to figure 1 , figure 2 , the present invention provides a substrate cleaning device, comprising:

[0055] a housing with a cleaning chamber inside;

[0056] A plurality of spray pipes 2 pivotally mounted on the housing and distributed side by side along the moving direction a of the substrate 1, each spray pipe 2 has a number of liquid spray ports that guide the liquid in the spray pipe 2 to the surface to be cleaned of the substrate 1 ...

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Abstract

The invention discloses a substrate cleaning device. The substrate cleaning device comprises a shell, a plurality of spraying pipelines installed on the shell in a pivoted mode and distributed side by side in the moving direction of a substrate, and a driving system, wherein a cleaning chamber is arranged in the shell, each spraying pipeline is provided with a plurality of liquid spraying openings guiding liquid in the spraying pipeline to a face to be cleaned of the substrate, and a transmission gear coaxially fixed with each spraying pipeline is arranged at one end of each spraying pipeline; the driving system drives the spraying pipelines to do same-frequency reciprocating rotation through the transmission gears, and the direction of the reciprocating rotation of a part of the spraying pipelines is opposite to the direction of the reciprocating rotation of the other part of the spraying pipelines. The substrate cleaning device can improve the cleaning effect on the surface of the substrate on the premise that influences on the moving speed of the substrate are small.

Description

technical field [0001] The invention relates to the technical field of flat panel display manufacturing equipment, in particular to a substrate cleaning device. Background technique [0002] Cleaning is a very important link in the production process of substrates used in flat panel displays. Whether it is before the substrate coating or after the substrate production process is completed, the cleaning effect will directly affect the product quality of the substrate. [0003] Most of the existing substrate cleaning devices use fixed spray pipes with nozzles facing the substrate. When cleaning the substrate, the nozzles spray the liquid in the spray pipe to the surface of the substrate in a direction perpendicular to the substrate. To realize the cleaning of the cleaned surface of the substrate. However, this cleaning method can directly spray less liquid into the channels, grooves or slits on the surface of the substrate, and the cleaning effect on the residual impurities i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B3/02B08B13/00
CPCB08B3/024B08B3/022
Inventor 马青青侯智吴代吾杨子衡张洪波王百强
Owner HEFEI BOE OPTOELECTRONICS TECH
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