Substrate cleaning device
A technology for cleaning devices and substrates, applied in cleaning methods and appliances, cleaning methods using liquids, chemical instruments and methods, etc., can solve the problems of poor cleaning effect and affect the cleaning effect of substrates, and achieve the effect of improving the cleaning effect
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0053] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0054] Please refer to figure 1 , figure 2 , the present invention provides a substrate cleaning device, comprising:
[0055] a housing with a cleaning chamber inside;
[0056] A plurality of spray pipes 2 pivotally mounted on the housing and distributed side by side along the moving direction a of the substrate 1, each spray pipe 2 has a number of liquid spray ports that guide the liquid in the spray pipe 2 to the surface to be cleaned of the substrate 1 ...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com