Micromechanical gyroscope with double-sensitive mode

Abstract

The invention designs a novel micromechanical gyroscope with a double-sensitive mode, which is mainly used for improving the gains of a micromechanical gyroscope so as to improve the sensitivity. The micromechanical gyroscope structure designed by the invention applies complete two-degree-of-freedom vibration structures to a driving mode and a sensitive mode; a double-sensitive mode structure is adopted, namely the sensitive mode has the two complete two-degree-of-freedom vibration structures which are connected with a driving framework and a decoupling framework of the driving mode through detection mass blocks respectively so as to realize the decoupling of the double-sensitive mode and the driving mode. The complete two-degree-of-freedom vibration structures can be used for increasing 3dB bandwidths of the driving mode and the sensitive mode, so that the stability of a gyroscope system is improved; the double-sensitive mode can improve the whole output gains and the sensitivity of the gyroscope system. The novel micromechanical gyroscope provided by the invention has the advantages of good stability, interference resistance and high sensitivity; vacuum encapsulation is avoided; the novel micromechanical gyroscope is good for extensive practical application.

Description

technical field [0001] The invention relates to a micromechanical gyroscope structure with dual sensitive modes. Background technique [0002] The development and research of micro-mechanical gyroscopes began in the late 1980s. In the past 20 years, research institutions in many countries have conducted in-depth research on micro-mechanical gyroscopes and achieved certain research results. Now, micromechanical gyroscopes have been applied to the fields of electronics, automobile industry, and intelligent navigation systems, and with the development of time, their scope of application has continued to expand. At present, the research of MEMS is mainly focused on the design of new device structures, how to design a good MEMS structure to improve the performance of MEMS. The structural design of the micro-mechanical gyroscope is mainly divided into two-degree-of-freedom structure and multi-degree-of-freedom structure: the driving mode and the sensitive mode of the two-degree-o...

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Problems solved by technology

For example, the patent application number is 201210124320.9, and the micromechanical gyroscope disclosed in the patent document named "a four-degree-of-freedom micromechanical gyroscope" adopts a complete two-degree-of-freedom vibration structure in both the driving mode and the sensitive mode. The sensitive mode is connected together through the decoupling frame and the detection mass. Although the micro-mechanical gyroscope ensures the stability of th

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