A capacitive temperature sensor

A temperature sensor, capacitive technology, used in thermometers, thermometers and instruments with directly sensitive electrical/magnetic components, etc., can solve the problems of high sensor cost and complex processing technology, and achieve simple manufacturing process and sensitive capacitance. Large, low-cost effects

Inactive Publication Date: 2015-11-11
SOUTHEAST UNIV
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Problems solved by technology

The processing technology is relatively complicated, not only the surface release process is required, but also the bonding process of silicon and glass is required, and the cost of the sensor is relatively high

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  • A capacitive temperature sensor
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Embodiment Construction

[0016] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0017] Preferred embodiments of the present invention are as follows:

[0018] like figure 2 As shown, the capacitive temperature sensor described in this embodiment includes a detection capacitance in an interdigital structure, and the detection capacitance is composed of side interdigital electrodes 1-2 covered with a passivation layer, middle interdigital electrodes 1 covered with a passivation layer -3, the temperature-sensing medium 2 is located in the cavity 4 between the side interdigital electrodes 1-2, the middle interdigital electrodes 1-3 and the electrodes and the substrate 1.

[001...

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Abstract

A capacitor type temperature sensor comprises a detection capacitor which is composed of a substrate (1), temperature sensing media (2), passivation layers (3), a middle interdigital electrode (1-3) and a side interdigital electrode (1-2). The detection capacitor has an interdigital structure with a high aspect ratio. The substrate (1) is located at the bottom of the detection capacitor and plays a role as a base. The temperature sensing media (2) are arranged between the middle interdigital electrode (1-3) and the substrate. The side interdigital electrode (1-2) is located on periphery of the detection capacitor. The passivation layers (3) are arranged on the periphery of the middle interdigital electrode (1-3) and located on the inner surface of the side interdigital electrode (1-2). The temperature sensing media (2) are located in the middle of the middle interdigital electrode (1-3), located between the side interdigital electrode (1-2) and the middle interdigital electrode (1-3), and located in a cavity (4) between the middle interdigital electrode (1-3) and the substrate (1). The capacitor type temperature sensor has the advantages of being high in sensitivity, simple in structure, convenient to machine, novel in temperature sensing structure and the like.

Description

technical field [0001] The invention relates to a MEMS (micro-electro-mechanical system) capacitive temperature sensor based on bulk silicon technology, especially a new type of interdigitated structure capacitor that uses the double change of the volume of the temperature-sensing medium and the dielectric constant of the temperature-sensing medium to sense temperature. type temperature sensor. Background technique [0002] The temperature sensor is the earliest developed and widely used type of sensor. People have been measuring temperature since the beginning of the 17th century. With the support of semiconductor technology, semiconductor thermocouple sensors, PN junction temperature sensors and integrated temperature sensors have been developed successively in this century. Correspondingly, according to the law of interaction between waves and matter, acoustic temperature sensors, infrared sensors and microwave sensors have been developed successively. With the develop...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01K7/34
Inventor 任青颖王立峰黄见秋黄庆安
Owner SOUTHEAST UNIV
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