System and method capable of realizing accurate measurement of off-axis amount of off-axis mirror
An off-axis mirror and precise measurement technology, which is applied in the system field of precise measurement of the off-axis amount of the off-axis mirror, can solve the problems of low initial positioning accuracy and difficulty in realizing accurate positioning of the mirror, and achieve accurate measurement of the off-axis amount , strong operability and high measurement accuracy
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[0036] see figure 1 The present invention provides a system capable of accurately measuring the off-axis amount of the off-axis mirror 5, the measurement system includes an imaging measurement device, a vertical turntable 8, a connecting plate 7, a two-dimensional translation stage 6 and a grating ruler 9; The three-dimensional translation platform 6 is arranged on the vertical turntable 8 through the connecting plate 7 and rotates around the rotation axis of the vertical turntable 8 with the vertical turntable 8; two-dimensional movement on the three-dimensional translation platform 6; one end of the grating ruler 9 is fixed on the connecting plate 7, and the other end rests on the side of the translation platform, which can measure the moving distance of the translation platform; the optical axis of the imaging measurement device and the vertical turntable 8 The rotating shafts are coincident; the imaging measurement device includes a cross reticle target 1 target, a CCD3, a...
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