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System and method capable of realizing accurate measurement of off-axis amount of off-axis mirror

An off-axis mirror and precise measurement technology, which is applied in the system field of precise measurement of the off-axis amount of the off-axis mirror, can solve the problems of low initial positioning accuracy and difficulty in realizing accurate positioning of the mirror, and achieve accurate measurement of the off-axis amount , strong operability and high measurement accuracy

Inactive Publication Date: 2016-06-08
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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  • Claims
  • Application Information

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Problems solved by technology

However, the measurement accuracy of the off-axis amount of the off-axis mirror in the process of processing is on the order of mm, which makes the initial positioning accuracy too low to meet the conditions for using computer-aided assembly, making it difficult to achieve accurate positioning of the mirror

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  • System and method capable of realizing accurate measurement of off-axis amount of off-axis mirror
  • System and method capable of realizing accurate measurement of off-axis amount of off-axis mirror
  • System and method capable of realizing accurate measurement of off-axis amount of off-axis mirror

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Embodiment Construction

[0036] see figure 1 The present invention provides a system capable of accurately measuring the off-axis amount of the off-axis mirror 5, the measurement system includes an imaging measurement device, a vertical turntable 8, a connecting plate 7, a two-dimensional translation stage 6 and a grating ruler 9; The three-dimensional translation platform 6 is arranged on the vertical turntable 8 through the connecting plate 7 and rotates around the rotation axis of the vertical turntable 8 with the vertical turntable 8; two-dimensional movement on the three-dimensional translation platform 6; one end of the grating ruler 9 is fixed on the connecting plate 7, and the other end rests on the side of the translation platform, which can measure the moving distance of the translation platform; the optical axis of the imaging measurement device and the vertical turntable 8 The rotating shafts are coincident; the imaging measurement device includes a cross reticle target 1 target, a CCD3, a...

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Abstract

The invention relates to a system and method capable of accurately measuring the off-axis amount of an off-axis mirror. The system includes an imaging measurement device, a vertical turntable, a connecting plate, a two-dimensional translation platform and a grating ruler; the two-dimensional translation platform passes through the connecting plate Set on the vertical turntable and rotate around the rotation axis of the vertical turntable with the vertical turntable; the off-axis reflector to be tested is set on the two-dimensional translation platform and performs two-dimensional movement on the two-dimensional translation platform; one end of the grating ruler It is fixed on the connection plate, and the other end rests on the translation platform; the optical axis of the imaging measurement device coincides with the rotation axis of the vertical turntable. The invention provides a system and method capable of accurately measuring the off-axis amount of an off-axis reflector with high measurement accuracy.

Description

technical field [0001] The invention belongs to the field of optical detection, and relates to a system and method for off-axis measurement, in particular to a system and method capable of realizing accurate measurement of off-axis reflection mirror off-axis. Background technique [0002] With the continuous development of aerospace and aviation, the form of optical system has developed from traditional coaxial system to off-axis multi-reflective optical system. For the off-axis multi-reflection optical system, due to the absence of the central optical axis of the off-axis mirror, it is difficult to pass through the system, resulting in a decrease in the coaxiality of the system, and it is difficult to meet the design requirements for image quality. If the off-axis distance of the off-axis mirror is known, the initial positioning of the mirror can be achieved by means of mechanical precise positioning, and the positioning accuracy is about 0.05mm; then the precise positionin...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B5/02
Inventor 张学敏段战军闫肃魏儒义段嘉友李华张志军
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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