Method for manufacturing external electrode of dry type multilayer ceramic capacitor

A technology of laminated ceramics and external electrodes, which is applied in the field of external electrode manufacturing of dry-type laminated ceramic capacitors, can solve problems such as poor contact of external electrodes of chips, and achieve the effect of strengthening adhesion

Inactive Publication Date: 2014-03-26
大连天壹电子有限公司
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Problems solved by technology

[0005] In order to solve the phenomenon that the chip often has poor contact with the external electrode in the dry method, the present invention provides a method for manufacturing the external electrode of the dry-type laminated ceramic capacitor

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  • Method for manufacturing external electrode of dry type multilayer ceramic capacitor
  • Method for manufacturing external electrode of dry type multilayer ceramic capacitor
  • Method for manufacturing external electrode of dry type multilayer ceramic capacitor

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Embodiment

[0045] refer to figure 1 , dry-type laminated ceramic capacitor external electrode manufacturing method of the present invention is to utilize dry method to manufacture high-quality capacitor (MLCC (Multi-Layer Ceramics Capacitor) method by multi-layer vapor deposition on silicon wafer. Include S1: wafer preparation stage ; S2: specify the electrode layer on the wafer and the stacked layer number stage of the dielectric layer; S3: the stage of forming the initial insulating layer on the wafer; S4: the stage of forming the electrode layer on the initial insulating layer; S5: on the electrode layer The stage of forming a dielectric layer on the top; S6: the stage of repeatedly laminating the electrode layer and the dielectric layer; S7: the stage of heat treatment of the electrode layer and the dielectric layer after lamination; S8: the stage of forming a protective layer after heat treatment; S9 : After the protective layer is formed, the wafer backside grinding stage; S10: Af...

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Abstract

A method for manufacturing an external electrode of a dry type multilayer ceramic capacitor includes the steps of preparing a silicon wafer, determining the number of electrode layers and the number of electric medium layers, forming an initial insulating layer, forming the electrode layers, forming the electric medium layers, enabling the electrode layers and the electric medium layers to be layered repeatedly, conducting thermal processing on the electrode layers and the electric medium layers, forming a protective layer, grinding the back face of the silicon wafer, segmenting the multilayer wafer in the form of a chip (Chip), etching the side face of the chip, and forming an external electrode. According to the method related to the structure, a preset circuit is used in the electrode layer forming step, and the external electrode is manufactured by executing the etching process well determined between the chip cutting step and the external electrode forming step. After a preset electrode layer circuit pattern and the chip are cut, adhesiveness between the electrode layers and the external electrode is enhanced through the cutting face etching method, and finally, the high-quality MLCC can be obtained.

Description

technical field [0001] The invention relates to an electrode manufacturing method, in particular to an external electrode manufacturing method of a dry laminated ceramic capacitor. Background technique [0002] MLCC—that is, multi-layer ceramic capacitors (Multi-layer ceramic capacitors) are capacitors manufactured as multi-layer electroplated metal films, and are accessories for temporary storage. It is mainly used in TV, VCR, PC, automotive electronics, mobile communication, digital AV machine, computer and other electrical appliances, and plays the role of DC-blocking, By-passing and AC. [0003] MLCCs are manufactured by stacking internal electrode layers and dielectric layers so that multiple capacitors are connected in parallel. There are two methods for forming the electrode layer and the dielectric layer. First, a liquid raw material is used as a raw material, and a wet method using a dielectric sheet of a ceramic material printed with an electrode pattern is used....

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01G4/232H01G4/30
Inventor 高在洪
Owner 大连天壹电子有限公司
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