Highly efficient air conditioning apparatus, using waste heat, for precisely controlling thermo-hygrostat in clean room

Abstract

The present invention relates to an air conditioning apparatus for controlling the temperature, humidity, and the filtration of air supplied to a clean room in a semiconductor manufacturing facility and, more particularly, to a highly efficient air conditioning apparatus, using waste heat, for precisely controlling a thermo-hygrostat in a clean room, which recovers waste heat released into the atmosphere by a conventional air conditioning system so as to control humidity with an energy supply reduced by the amount of energy from the waste heat, and which divides a waste heat reuse coil and a condensing coil into multiple steps so as to precisely and effectively control the change in the amount of heat released by a condenser as the dehumidification load of an evaporator changes in line with the change in an indoor load or a fresh air load.

Description

technical field [0001] The present invention relates to an air conditioner that filters air supplied to a clean room of semiconductor manufacturing equipment and controls temperature and humidity, and more particularly relates to a constant temperature and humidity device for precise control of waste heat utilization and high efficiency clean room An air conditioner that recovers the waste heat discharged to the atmosphere from the existing air conditioning system, and adjusts the humidity without supplying additional energy equivalent to the waste heat energy. The waste heat recycling coil and the condensing coil are divided into multiple stages in stages (STEP), The dehumidification load of the evaporator can be changed according to the change of the indoor load or the external air load, so that the change of the heat generated in the condenser can be effectively and precisely controlled. Background technique [0002] Generally, products such as semiconductors and liquid c...

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Problems solved by technology

[0006] However, in the case of the outdoor air conditioner, since it consumes a considerable amount of energy, there is a problem that the demand for energy saving cannot be fully met by simply recovering the heat of the discharged gas to preheat or precool the introduced outdoor air.

[0007] Moreover, the cooling load of the clean room is large, and the humidity of the outside air is high in summer, and the dehumidification load occupies most of it. Therefore, in order to adjust the humidity when air conditioning the clean room, the air conditioner is configured so that most of the load is used for cooling, In a system that dehumidifies and reheats with additional heating, the problem of cooling and dehumidification is as follows: for the indoor set temperature and humidity, the indoor set temperature is overcooled to the dew point temperature and dehumidified, and then reheated (Reheating) to the proper temperature, so that due to the opposing effects of cooling and heating, an over-consumption of energy occurs

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