Air-conditioning unit with precise control of waste heat utilization and high-efficiency clean room constant temperature and humidity

A technology of precision control and air conditioning device, applied in air conditioning systems, heating and ventilation control systems, applications, etc., and can solve problems such as consumption, large cooling load, and inability to fully meet the needs of energy saving.

Active Publication Date: 2016-06-15
EGENC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, in the case of the outdoor air conditioner, since it consumes a considerable amount of energy, there is a problem that the demand for energy saving cannot be fully met by simply recovering the heat of the discharged gas to preheat or precool the introduced outdoor air.
[0007] Moreover, the cooling load of the clean room is large, and the humidity of the outside air is high in summer, and the dehumidification load occupies most of it. Therefore, in order to adjust the humidity when air conditioning the clean room, the air conditioner is configured so that most of the load is used for cooling, In a system that dehumidifies and reheats with additional heating, the problem of cooling and dehumidification is as follows: for the indoor set temperature and humidity, the indoor set temperature is overcooled to the dew point temperature and dehumidified, and then reheated (Reheating) to the proper temperature, so that due to the opposing effects of cooling and heating, an over-consumption of energy occurs

Method used

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  • Air-conditioning unit with precise control of waste heat utilization and high-efficiency clean room constant temperature and humidity
  • Air-conditioning unit with precise control of waste heat utilization and high-efficiency clean room constant temperature and humidity
  • Air-conditioning unit with precise control of waste heat utilization and high-efficiency clean room constant temperature and humidity

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Embodiment Construction

[0014] Regarding the above objects and advantages of the present invention, those skilled in the art can more clearly understand the preferred embodiments of the present invention described below with reference to the accompanying drawings.

[0015] First of all, the technical idea adopted in the present invention is explained. In the process of dehumidification due to the high humidity of the outside air in summer, the temperature drops due to supercooling, so reheating is required, and more heat energy will be consumed at this time. The existing While conventional air conditioners discharge the waste heat of the outdoor unit generated when cooling the air to the atmosphere, the present invention aims to recover the waste heat discharged to the atmosphere and adjust the humidity without supplying additional energy equivalent to the energy of the waste heat.

[0016] In addition, the present invention expects the additional effect of compensating for the supercooled temperature...

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Abstract

The present invention relates to an air conditioner that filters air supplied to a clean room of semiconductor manufacturing equipment and controls temperature and humidity, and more particularly relates to a constant temperature and humidity device for precise control of waste heat utilization and high efficiency clean room An air conditioner that recovers the waste heat discharged to the atmosphere from the existing air conditioning system, and adjusts the humidity without supplying additional energy equivalent to the waste heat energy. The waste heat recycling coil and the condensing coil are divided into multiple stages in stages (STEP), The dehumidification load of the evaporator can be changed according to the change of the indoor load or the external air load, so that the change of the heat generated in the condenser can be effectively and precisely controlled.

Description

technical field [0001] The present invention relates to an air conditioner that filters air supplied to a clean room of semiconductor manufacturing equipment and controls temperature and humidity, and more particularly relates to a constant temperature and humidity device for precise control of waste heat utilization and high efficiency clean room An air conditioner that recovers the waste heat discharged to the atmosphere from the existing air conditioning system, and adjusts the humidity without supplying additional energy equivalent to the waste heat energy. The waste heat recycling coil and the condensing coil are divided into multiple stages in stages (STEP), The dehumidification load of the evaporator can be changed according to the change of the indoor load or the external air load, so that the change of the heat generated in the condenser can be effectively and precisely controlled. Background technique [0002] Generally, products such as semiconductors and liquid c...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F24F5/00F24F11/00
CPCF24F3/1405F24F3/167Y02P80/10F24F2203/1024Y02B30/56
Inventor 金权中
Owner EGENC
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