Accelerometer employing main and auxiliary beam structure
A technology of accelerometer and auxiliary beam, which is applied in the field of measurement, can solve the problems of inaccurate measurement results, etc., and achieve the effect of improving static sensitivity and ensuring measurement accuracy
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[0010] The present invention will be described in more detail below in conjunction with the accompanying drawings and embodiments.
[0011] As shown in the figure, the present invention is an accelerometer with a main and sub-beam structure, including a closed regular quadrilateral frame 4, a concave mass block 3 at the center of the frame 4, and the concave portion of the mass block 3 passes through the main cantilever The beam 1 is connected to the outer frame 4, and the convex parts on both sides of the concave part of the mass block 3 are respectively connected to the outer frame 4 through a sub-beam 2. The elastic coefficient of the main cantilever beam 1 is 6000N / m, and the elastic coefficient of the sub-beam 2 is 120N / m. m, the length of the main cantilever 1 is 4000 μm, the length of the sub-beam 2 is 80 μm, the width of the main cantilever 1 is 100 μm, and the width of the sub-beam 2 is 2 μm, wherein the surface of the sub-beam 2 is provided with a force-sensitive resi...
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