A direction-changing transmission positioning mechanism of laser molecular beam evaporation system

Abstract

The invention discloses a steering transmission locating mechanism for a laser molecular beam evaporation system, which overcomes the defects that when a magnetic rod is adopted to carry out sample delivery connection in the prior art, the length of the magnetic rod needs to be increased, the distance and the angle are adjusted by an operation of two persons or more in a matching manner when two vacuum chambers are long in distance due to the fact that the magnetic rod just can be operated outside the vacuum chambers, or the material is fed from the vacuum chambers at two sides, thus openings of the vacuum chambers and welding spots between the vacuum chambers and a flange are additionally arranged, and the processing cost of the equipment is increased. The steering transmission locating mechanism is characterized in that sample delivery connection is achieved by adopting a rotation component and a guide sleeve processed with a spiral curve slideway. The steering transmission locating mechanism has the beneficial effects that the whole set of mechanism can be arranged inside each vacuum chamber, and the openings of the vacuum chambers are reduced. Thus, unnecessary leak sources of the vacuum chambers are reduced. The mechanism is arranged between the two vacuum chambers, and can be operated outside the vacuum chambers by one person, and observation of the sample connection condition is facilitated. An automatic rotation angle of a sample fork can be achieved because of adopting the spiral slideway, and the angle does not need to be adjusted by manpower or a mechanical arm.

Description

technical field [0001] The invention belongs to the field of vacuum technology, and in particular relates to a direction-changing transmission positioning mechanism for a laser molecular beam evaporation system used in a linear laser molecular beam deposition combined coating system to transfer substrates between multiple vacuum chambers. Background technique [0002] The laser molecular beam evaporation system is used to grow high-quality crystal thin films on crystal substrates. Under ultra-high vacuum conditions, the vapor generated by heating in a furnace equipped with various required components is collimated through small holes to form The molecular beam or atomic beam is directly sprayed onto the single crystal substrate at an appropriate temperature, and at the same time, the molecular beam is controlled to scan the substrate, so that the molecules or atoms can be "grown" layer by layer according to the crystal arrangement to form a thin film on the substrate. The te...

AI Technical Summary

Problems solved by technology

In practical applications, due to the different requirements for the materials used to form the film, the substrate needs to be replaced, but at the same time it is required not to affect the vacuum degree, so it is necessary to carry out the transfer of the substrate in the vacuum system. In the prior art, without damaging The substrate transfer between the vacuum chamber and the vacuum chamber is realized in the vacuum state of the system, usually by using a magnetic bar. Since the evaporation system is composed of three vacuum chambers, they are LMBE (laser molecular beam epitaxy) chamber and lofting chamber. And the magnetron room, in which the heating furnace of the magnetron room is parallel to the horizontal plane, while the heating furnace of the LMBE room and the substrate library of the lofting room have a certain angle to the horizontal plane, and the substrate fork needs to be rotated at a certain angle during the substrate transfer process to clamp the substrate. In the prior art, the magnetic rod can only be operated outside the vacuum chamber, and only the inner sleeve connected with the substrate fork can enter the vacuum chamber. When the distance between the two vacuum chambers is long, the length of the magnetic rod needs to be increased. It is very inconvenient. It is not easy for the operator to observe the rotation angle of the substrate fork, nor can he see the position between the substrate fork and the heating furnace. It is difficult to operate alone, and two or more people need to cooperate to adjust distance and angle, or feed from both sides of the vacuum chamber, so that two sets of magnetic rods are required, and two connecting flanges need to be added to the vacuum chamber to increase the opening of the vacuum chamber and the welding points between the vacuum chamber and the flange , increasing equipment processing costs

Images