Coating manufacturing method
A manufacturing method and coating technology, applied to semiconductor/solid-state device components, semiconductor devices, electrical components, etc., can solve problems such as productivity decline, yield decline, and workpiece damage
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[0060] In the present example, a plated film was produced on the surface of the workpiece in the following procedure.
[0061] Such as figure 1 As shown, by connecting a polarity inversion power supply 15 between the workpiece 12 and the electrode 13 and connecting a DC power supply 16 between the workpiece 12 and the electrode 14, the coating film was produced.
[0062] At this time, as the workpiece 12, a metal plate composed of a copper alloy (C194) was used. In addition, as the composition of the plating solution, copper sulfate containing 200g / L, sulfuric acid of 100g / L, chlorine gas of 50ppm, brightener of 2ml / L (manufactured by Rohm&Hass Co., trade name: MICROFILL TM EVF BRIGHTER), 10 ml / L leveler (manufactured by Rohm & Hass Co., trade name: MICROFILL TM EVF LEVELER), and 20 ml / L polymer (manufactured by Rohm & Hass Co., trade name: MICROFILL TM EVF C2) plating solution.
[0063] After producing the coating film under the above-mentioned conditions, it can be co...
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