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VALVE , especially vacuum valve

A vacuum valve, valve seat technology, used in sliding valves, valve devices, engine components, etc.

Inactive Publication Date: 2015-02-11
VAT HLDG AG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But how durable and effective this type of grounding seems to be in question

Method used

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  • VALVE , especially vacuum valve
  • VALVE , especially vacuum valve
  • VALVE , especially vacuum valve

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0018] exist figure 1 The center shows a first embodiment of the valve 1 according to the invention in the closed position. In this closed position, the closure member 3 seals the passage opening 2 of the valve 1 against the valve seat 6 with the seal 4 interposed. In order to be able to exert a corresponding force, the support means 5 is supported on a counter-seat 7 of the valve 1 . The seal 4 is mostly made of an electrically insulating material. In the shown embodiment the valve seat 6 and the counter seat 7 are part of the valve housing 17 . Both surround the passage opening through the valve 1 . Not only gaseous media but also components to be processed in the process chamber can be introduced into the process chamber (not shown here) and removed again from the process chamber through the passage opening 2 formed in one piece in this way. The passage opening 2 of the valve 1 is arranged in such a way that it coincides with the corresponding removal opening and filli...

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PUM

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Abstract

A valve with a closure member that, in its closed position, seals the through-opening, with the interposition of the seal against the valve seat, and is movable into the closed position by a relative movement between the closure member and the supporting member. The supporting member, in the closed position of the closure member, is supported on the abutment seat. The valve also has at least one grounding element for electrically grounding the closure member in its closed position, fastened on a carrier component of the valve. The carrier component is the closure member, the supporting member, the valve seat, or the abutment seat. The grounding element has a contact element and a supporting element, which is connected to the contact element, and the contact element and the supporting element are formed of mutually different materials or material compositions and the contact element is softer than the supporting element.

Description

technical field [0001] The invention relates to a valve, in particular a vacuum valve, with at least one passage opening and at least one closing means and at least one sealing element and at least one supporting means and at least one valve seat and at least one mating seat (Gegensitz), wherein the closing In its closed position, the mechanism seals against the valve seat through the opening with a seal interposed and can be brought into the closed position by means of a relative movement between the closing mechanism and the supporting mechanism, wherein the closing mechanism In the closed position, the support mechanism is supported at the mating seat and the valve additionally has at least one grounding element for electrically grounding the closure mechanism in its closed position, wherein the grounding element is fastened to a support component of the valve and the support component is Closing means or support means or valve seat or mating seat. Background technique ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16K3/02F16K3/30
CPCF16K3/02F16K3/30F16K3/18F16K51/02
Inventor H.伯哈特O.梅尔
Owner VAT HLDG AG