On-chip integrated beam combining laser based on photonic crystal y-waveguide and manufacturing method thereof

A photonic crystal and two-dimensional photonic crystal technology, which is applied to the structure of optical waveguide light guide and optical waveguide semiconductor, can solve the problem that the semiconductor laser unit device cannot balance high output power and high beam quality well, and avoid the interface Loss, cost and difficulty reduction, compactness effect
CN104466674BActive Publication Date: 2017-07-14吉光半导体科技有限公司
5 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
吉光半导体科技有限公司
Publication Date
2017-07-14

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

On-chip integrated beam-combining laser based on photonic crystal Y-waveguide and its manufacturing method belong to the field of optoelectronic semiconductor technology. On the bottom, an n-type buffer layer, an n-type cladding layer, a lower waveguide layer, a quantum well, an upper waveguide layer, a p-type cladding layer, and a p-type capping layer are sequentially grown by metal-organic chemical vapor deposition, and it also includes three lasers. Three lasers are connected to a rectangular waveguide, in which two parallel lasers with a certain distance are connected to the left side of the rectangular waveguide, and the other laser is connected to the right side of the rectangular waveguide; a rectangular waveguide is connected to the three lasers ; The three lasers and the rectangular waveguide are formed on the p-type cover layer by etching down to the p-type cladding layer; a Y-waveguide two-dimensional photonic crystal, the photonic crystal is located on the rectangular waveguide.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The invention relates to an on-chip integrated beam combining laser based on a photonic crystal Y waveguide and a manufacturing method thereof, belonging to the technical field of optoelectronic semiconductors. Background technique

[0002] Semiconductor lasers are widely used in many fields such as industry, military, medical treatment, and communications. Their main applications include material processing, laser printing, reading and writing of optical storage, laser ranging, pumping solid-state lasers, optical communications, and optical storage. Interconnection, etc., but low power limits the further application of semiconductor lasers. The output power can be increased by combining beams, and the beam quality can be improved by collimating the fast and slow axes, which provides possibilities for more and wider applications. However, beam combining requires a large number of optical elements, which not only increases the cost but also increases t...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More