Micro sensing device based on coriolis force effect and combined structure thereof

A sensing device, miniature technology, applied in the direction of using electric/magnetic devices to transmit sensing components, measuring devices, steering sensing equipment, etc., can solve the problem of affecting the sensing accuracy, the inability to realize miniaturization, and affecting the acquisition of magnetoelectric conversion signals, etc. problems, to achieve the effect of improving sensing accuracy, realizing miniaturization, and facilitating collection

Active Publication Date: 2015-04-22
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, the detection sensor proposed in this patent application cannot be miniaturized, and the spatial movement of the moving magnet has positional instability factors, which affect the acquisition of magnetoelectric conversion signals and affect the sensing accuracy.

Method used

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  • Micro sensing device based on coriolis force effect and combined structure thereof
  • Micro sensing device based on coriolis force effect and combined structure thereof
  • Micro sensing device based on coriolis force effect and combined structure thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0056] This embodiment provides a micro-sensing device based on the Coriolis force effect, which includes a housing, a mass body disposed inside the housing, a displacement driving body, and a sensing mechanism. The housing is used as a rotating system. The angular velocity is ω, the mass body moves relative to the housing under the driving action of the displacement driving body and the rotation of the housing, and the sensing mechanism is used to collect the magnetoelectric conversion signal of the mass body; wherein:

[0057] The mass body has the following structure:

[0058] It includes a rigid body and a mobile magnetic structure that is arranged inside the rigid body and connected with the rigid body;

[0059] A guide support body is provided between the mass body and the displacement driving body, and at least one position constraining shrapnel a is vertically connected between the mass body and the guide support body, and the position restraint shrapnel a is used to c...

Embodiment 2

[0087] Embodiment 2 is a modification example of Embodiment 1.

[0088] On the basis of embodiment 1, this embodiment differs from embodiment 1 in that:

[0089] The guide bracket body adopts a guide bracket block, and the lower end of the guide bracket block is provided with a cavity for placing a driving magnetic structure.

Embodiment 3

[0091] Embodiment 3 is a modification example of Embodiment 1.

[0092] On the basis of embodiment 1, this embodiment differs from embodiment 1 in that:

[0093] The position-limiting mechanism adopts a position-constraining shrapnel b, and the position-constraining shrapnel b is horizontally connected between the driving magnetic structure and the housing to constrain the horizontal displacement of the driving magnetic structure.

[0094] Further, the guide bracket body adopts a guide bracket rod body a, and the guide bracket rod body a includes a rigid rod a and a rigid beam a horizontally arranged on the rigid rod a, and the free end of the rigid rod a is rigidly connected to the driving magnetic structure .

[0095] Further, a guide bracket rod body b is provided between the mass body and the housing, and the guide bracket rod body b includes a rigid rod b and a rigid beam b horizontally arranged on the rigid rod b, and the rigid rod b is free A position-constraining shr...

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Abstract

The invention provides a micro sensing device based on a coriolis force effect. According to the micro sensing device, a mass body refers to a movable magnetic structure body; a guide bracket body is arranged between the mass body and a displacement driving body; at least one position constraint elastic sheet a is connected between the mass body and the guide bracket body; each position constraint elastic sheet a is used for constraining the vertical displacement of the mass body. Meanwhile, the invention provides a combined structure of the sensing device. Based on the coriolis force effect, a sensing mechanism is arranged in a shell or is arranged on each position constraint elastic sheet, and the miniaturization of the device is realized. According to the position constraint elastic sheets, the moving direction of a driving magnetic structure body and the movable magnetic structure body is constrained, the stable spatial movement position of the movable magnetic structure body is realized, a magneto-electricity conversion signal is conveniently acquired, and the sensing precision is improved. Moreover, multiple kinds of sensing forms are provided, the signal magnitude obtained by the multiple sensing forms is enhanced and averaged, and the sensing precision is relatively high.

Description

technical field [0001] The invention relates to the technical field of force detection sensors, in particular to a micro sensor device based on the Coriolis force effect and its combined structure. Background technique [0002] According to the theory of Newtonian mechanics, taking the rotating system as the reference system, the tendency of the linear motion of the particle to deviate from the original direction is attributed to the action of an external force, which is the Coriolis force and is defined as: In the formula is the Coriolis force; m is the particle mass; is the velocity of particle motion; is the angular velocity of the rotating system. [0003] The existing detection sensor based on Coriolis force, for example, the publication number is 103913158A, the publication date is July 09, 2014, and the Chinese patent application titled "Magnetoelectric Coriolis force detection sensor" provides A magnetoelectric Coriolis force detection sensor is proposed. In ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/56G01D5/12
CPCG01C19/5733
Inventor 杨斌堂杨诣坤
Owner SHANGHAI JIAO TONG UNIV
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