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Power supply device of high-voltage cold cathode gas discharging electronic gun and control method of power supply device

A high-voltage power supply and voltage control technology, applied in discharge tubes, electrical components, circuits, etc., can solve the problems of small kinetic energy, difficulty, and slow electronic speed.

Active Publication Date: 2015-04-22
AVIC BEIJING AERONAUTICAL MFG TECH RES INST
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Problems solved by technology

Compared with the high-voltage hot cathode electron beam system, the electron speed is slow, the kinetic energy is small, and the electron beam penetration ability is not strong, so it is difficult to adapt to welding and other processing technologies

Method used

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  • Power supply device of high-voltage cold cathode gas discharging electronic gun and control method of power supply device
  • Power supply device of high-voltage cold cathode gas discharging electronic gun and control method of power supply device
  • Power supply device of high-voltage cold cathode gas discharging electronic gun and control method of power supply device

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Embodiment Construction

[0110] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with the embodiments and accompanying drawings. Here, the exemplary embodiments and descriptions of the present invention are used to explain the present invention, but not to limit the present invention.

[0111] figure 1 It is a structural schematic diagram of the power supply device of the middle and high voltage cold cathode gas discharge electron gun implemented in the present invention. An embodiment of the present invention provides a power supply device for a high-voltage cold-cathode gas discharge electron gun, which is used to obtain an electron beam generation technology with a long cathode life and high electron movement speed, such as figure 1 As shown, the power supply device includes: a high-voltage power supply 10, a high-voltage sampling circuit 31, an ionization power supply 20,...

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Abstract

The invention provides a power supply device of a high-voltage cold cathode gas discharging electronic gun and a control method of the power supply device. The power supply device comprises a high-voltage power supply, a high-voltage sampling circuit, an ionization power supply, an ionization voltage sampling circuit, a voltage controlling and adjusting circuit, a beam sampling resistor and a beam controlling and adjusting circuit. According to the technical scheme, sampling signals of the high-voltage sampling circuit, the ionization voltage sampling circuit and the beam sampling resistor serve as feedback quantities and are compared with a set value, the high-voltage power supply, the ionization power supply and a gas flow controller are controlled in a closed loop mode, and therefore output of the high-voltage power supply, the ionization power supply and electronic beams is stable. By means of the technical scheme, the working voltage of the high-voltage cold cathode gas discharging electronic gun can be increased, and a novel electron beam source long in service life can be obtained.

Description

technical field [0001] The invention relates to the field of electron beam processing equipment, in particular to a power supply device of a high-voltage cold cathode gas discharge electron gun and a control method thereof. Background technique [0002] Cold cathode gas discharge electron beam processing equipment has been widely used in electron beam smelting, EB-PVD and other industrial fields. One of the core technologies of cold cathode gas discharge electron beam processing equipment technology is cold cathode gas discharge electron gun. The cathode life of a cold-cathode gas discharge electron gun is several times or even dozens of times that of a conventional hot-cathode electron gun. -2 Pa can work normally. Due to the limitation of the physical characteristics of gas discharge, the working voltage of cold cathode gas discharge electron guns is relatively low, generally less than 40kV. The maximum operating voltage of commonly used hot cathode electron guns can re...

Claims

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Application Information

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IPC IPC(8): H01J37/077H01J37/04
CPCH01J37/04H01J37/077H01J2237/06366
Inventor 许海鹰左从进韩瑞清
Owner AVIC BEIJING AERONAUTICAL MFG TECH RES INST
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