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Measuring system with carrier element and sensor

A measurement system and sensor technology, applied in the field of measurement systems, can solve problems such as changes

Active Publication Date: 2017-09-15
ENDRESS HAUSER FLOWTEC AG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the range of fluid conduction between the micromechanical sensor and the carrier element does not have the same dead volume in the individual models, but varies significantly in mass production

Method used

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  • Measuring system with carrier element and sensor
  • Measuring system with carrier element and sensor
  • Measuring system with carrier element and sensor

Examples

Experimental program
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Embodiment Construction

[0041] in Figure 1-13 The measuring system shown in is preferably used in measuring instruments for process and automation technology.

[0042] The invention relates to a joint solution of a sensor on a carrier element. These sensors are described as micromechanical sensors in the following embodiments. Of course, the present invention is not limited to micromechanical sensors.

[0043] The base surface of the preferred sensor may preferably correspond to the largest base surface of the wafer. Here, the following surface is understood to be the base surface by which the sensor can be connected to the carrier element.

[0044] It is particularly preferred that at least one side length of the sensor is less than or equal to 10 cm. It is very particularly preferred that all sides of the sensor are less than or equal to 10 cm.

[0045] figure 1 A second embodiment of the sensor 1 is shown. The sensor is configured as a sensor for a Coriolis mass flow meter. In this embodiment, the sen...

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PUM

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Abstract

A measuring system comprising: a) a carrier element (14, 21, 32, 41) with a longitudinal axis (A), on which sensors (1, 22, 33) are arranged for ascertaining the gaseous state or A process quantity of a liquid fluid, and b) a sensor (1, 22, 33), wherein the sensor (1, 22, 33) has a fluid channel (34), and wherein the carrier element (14, 21, 32, 41) has Fluid channel, characterized in that, in order to connect the fluid channel of the carrier element (14, 21, 32, 41) with the fluid channel (34) of the sensor (1, 22, 33), the carrier element (14, 21, 32, 41 ) each have at least one coupling element (6, 7, 23, 35, 42), which protrudes from the carrier element (14, 21, 32, 41) perpendicularly to the longitudinal axis (A) and which protrudes into In the fluid channel (34) of the sensor (1, 22, 33).

Description

Technical field [0001] The invention relates to a measurement system according to the preamble of claim 1 comprising a carrier element and a sensor. Background technique [0002] A generic measuring system with carrier elements of micromechanical sensors is disclosed in DE 10 2011 119 472 B3. especially in figure 1 In this case, the measurement system has a connection part provided by a soldering part between the carrier element and the micromechanical sensor. In addition, DE 10 2011 119 472 B3 also discloses that a soldering part called a chip holding part is equipped with lead-in and / or lead-out leads. The solder part is in the document figure 1 with figure 2 Of course, it is shown ideally. To be precise, the distribution of solder and its boundaries are not uniform. Therefore, the range of fluid conduction between the micromechanical sensor and the carrier element does not have the same dead volume in each model, but will change significantly in mass production. Summary o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01L9/00B81B7/00G01F15/14
CPCB01L3/502715G01F15/14G01N33/0009G01D11/30
Inventor 阿希姆·维斯特克里斯托夫·休伯哈根·费特弗兰克·施泰因霍夫
Owner ENDRESS HAUSER FLOWTEC AG