Measuring system with carrier element and sensor
A measurement system and sensor technology, applied in the field of measurement systems, can solve problems such as changes
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[0041] in Figure 1-13 The measuring system shown in is preferably used in measuring instruments for process and automation technology.
[0042] The invention relates to a joint solution of a sensor on a carrier element. These sensors are described as micromechanical sensors in the following embodiments. Of course, the present invention is not limited to micromechanical sensors.
[0043] The base surface of the preferred sensor may preferably correspond to the largest base surface of the wafer. Here, the following surface is understood to be the base surface by which the sensor can be connected to the carrier element.
[0044] It is particularly preferred that at least one side length of the sensor is less than or equal to 10 cm. It is very particularly preferred that all sides of the sensor are less than or equal to 10 cm.
[0045] figure 1 A second embodiment of the sensor 1 is shown. The sensor is configured as a sensor for a Coriolis mass flow meter. In this embodiment, the sen...
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