Batch and large-area preparation method of two-dimensional material film
A two-dimensional material, large-area technology, applied in the field of two-dimensional material film preparation, can solve the problems of being unsuitable for batch large-area preparation, taking a lot of time, wasting resources, etc., and achieving the effects of convenient operation, environmental protection, and improved production efficiency
Active Publication Date: 2018-06-29
杭州极丰科技有限公司
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Problems solved by technology
[0004] The technical problem to be solved by the present invention is: the existing batch large-area preparation method of two-dimensional material film needs to spend a lot of time, waste a lot of resources, and may cause potential environmental pollution, so it is not suitable for batch large-area preparation
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Embodiment Construction
[0023] A batch large-area preparation method of a two-dimensional material film has the following steps:
[0024] a. Firstly, a two-dimensional material thin film 2 is grown on the surface of the growth substrate 1 by chemical vapor deposition method or organic precursor pyrolysis preparation method.
[0025] Growth substrate 1 is copper foil, nickel foil, iron foil, germanium foil, ruthenium foil, iridium foil, cobalt foil, palladium foil, gold foil, platinum foil or rare earth metal foil or alloy foil containing these metals such as copper-nickel alloy foil .
[0026] The specific steps for growing graphene on the surface of the growth substrate 1 by chemical vapor deposition are as follows: carbon dioxide gas is passed through a bubbling bottle filled with alcohol liquid such as ethanol, methanol or isopropanol to obtain carbon dioxide gas containing alcohol vapor , the gas is used as the gas for vapor deposition. When the gas is sent into the chemical vapor deposition dev...
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The invention relates to a large-scale preparation method of a two-dimensional material film in batches. The preparation method is as follows: a. First, a two-dimensional material film is grown on the surface of a growth substrate; b. The growth substrate with the two-dimensional material film is inserted through steam layer processing; c. then coating the polymer on the two-dimensional material film; d. transferring the two-dimensional material film to the polymer substrate; e. separating the two-dimensional material film transferred to the polymer substrate from the growth substrate. After step e, the two-dimensional material thin film transferred on the polymer substrate is transferred to another target substrate again, and the polymer substrate is removed by etching. The beneficial effect is that the growth base can be recycled, the operation is convenient, the process is simple, the production efficiency is greatly improved, and the production cost is reduced.
Description
technical field [0001] The invention relates to the technical field of preparation of two-dimensional material films, in particular to a method for preparing large-scale batches of two-dimensional material films. Background technique [0002] Two-dimensional materials can be regarded as a new type of material that is different from metals, semiconductors, and insulators. This material can be used in the manufacture of flexible transparent electrodes, field effect transistors, high-sensitivity gas sensors, electromechanical devices, and translational motors. Graphene is a single-atom-thick graphite crystal, which is an ideal two-dimensional material. Graphite crystal is a three-dimensional material composed of a large number of graphene superimposed together. Graphene material is a general term for single-layer or multi-layer graphene. Since graphene is a zero-energy-gap semiconductor, it not only has excellent mechanical properties, electrical and thermal conductivity, but a...
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IPC IPC(8): C01B32/186
Inventor 游学秋罗达
Owner 杭州极丰科技有限公司