High rigidity low thermal expansion casting and manufacturing method thereof

A low thermal expansion and manufacturing method technology, applied in the field of high rigidity low thermal expansion castings and its manufacturing, can solve the problems of low thermal expansion, which cannot be realized, and the thermal expansion coefficient becomes high, and achieve the effect of low Ms point and high rigidity
CN105296844BActive Publication Date: 2019-02-01신호코쿠머티리얼가부시키가이샤
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
신호코쿠머티리얼가부시키가이샤
Publication Date
2019-02-01

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Abstract

The present invention provides a casting with high rigidity and low thermal expansion and a manufacture method thereof. The casting is composed of Ni of 27-35 mass%, the balance of Fe and unavoidable impurities. The average crystal grain size of an austenite structure is less than 200[Mu]m.
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Description

technical field

[0001] The present invention relates to high rigidity low thermal expansion castings with high Young's modulus and methods of making the same. Background technique

[0002] Thermally stable Invar alloys are widely used as component materials for electronic and / or semiconductor-related equipment, laser processing machines, and ultra-precision processing equipment. However, conventional Invar alloys have a problem that their Young's modulus is small, about one-half of that of general steel materials. Therefore, it is necessary to design a high-rigidity design such as increasing the thickness of the target component.

[0003] In order to solve this problem, Patent Document 1 discloses high Young's modulus and low thermal expansion Fe-Ni in which Young's modulus is increased by adding Nb or the like to make an ingot, and then hot forging and / or rolling. alloy.

[0004] Patent Document 2 discloses a member of an ultra-precision device using an alloy steel in wh...

Claims

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