Method and device for forming protrusion by masking on surface of basic material
A mask and base material technology, applied in the field of forming bumps, can solve the problems of difficult large-area and high-speed production, high cost, etc.
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[0043] Hereinafter, the present invention will be described in detail with reference to the drawings.
[0044] figure 1 is a sequence diagram of a method of forming bumps through a mask according to an embodiment of the present invention.
[0045] The method for forming protrusions through a mask of the present invention includes: a mask forming step, forming a mask layer on the base material; an etching step, etching the area where the mask is not formed on the base material; and a mask removing step, removing The mask layer, and the mask forming step includes the step of forming at least one or more small masks, and the step of forming at least one or more large masks.
[0046] Small masks and large masks are based on Figure 10 The tables shown are differentiated and have different light transmission characteristics depending on the size. In the case of the first-type protrusions (D1), the thickness may be 10 nm or less, but considering the light transmittance according ...
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