Interdigital metal strain gauges in laterally distributed five-sensitive grids that can measure the lateral deflection of one-sided double-biased sensitive grids

Abstract

The invention relates to an interdigital metal foil gauge in five transversely distributed sensitive grids capable of measuring the outer transverse deviation of a single-side double-bias sensitive grid. A substrate and the five sensitive grids fixed on the substrate are included, each sensitive grid comprises a sensitive segment and transitional segments, and the axes of all the sensitive segments are lines in parallel in the same plane; in the plane, the direction of the axes is the axial direction, and the direction vertical to the axial direction is the transverse direction; the centers of the five sensitive grids have no deviation in the axial direction and have deviation in the transverse direction; the sparse sensitive grid, the first intermediate sensitive grid, the second intermediate sensitive grid, the first dense sensitive grid and the second dense sensitive grid are successively arranged from top to bottom in the transverse direction according to the center positions of the sensitive grids; and the two sensitive grids in the middle are arranged in an interdigital manner, the two sensitive grids in the lower portion are also arranged in the interdigital manner, the total resistance change values of the sensitive grids in the same strain are in the proportion of 3:8:8:5:5. The sparse sensitive grid is used in a time-sharing multiplexing manner; and the strain transverse first-order deviation of one position of the central lower outer side of the first dense sensitive grid and the strain transverse first-order deviation of one position of the central lower outer side of the second dense sensitive grid can be measured almost at the same time, the distance from the position of the central lower outer side of the first dense sensitive grid to the center of the first dense sensitive grid equals that from the center of the first dense sensitive grid to the center of the first intermediate sensitive grid, and the distance from the position of the central lower outer side of the second dense sensitive grid to the center of the second dense sensitive grid equals that from the center of the second dense sensitive grid to the center of the second intermediate sensitive grid.

Description

technical field [0001] The invention relates to the field of sensors, in particular to a metal strain gauge. Background technique [0002] The working principle of the metal resistance strain gauge is the resistance strain effect, that is, when the metal wire is subjected to strain, its resistance changes correspondingly with the magnitude of the mechanical deformation (stretch or compression). The theoretical formula for the resistance strain effect is as follows: [0003] [0004] Where R is its resistance value, ρ is the resistivity of the metal material, L is the length of the metal material, and S is the cross-sectional area of ​​the metal material. During the process of mechanical deformation of the metal wire under strain, ρ, L, and S will all change, which will inevitably cause changes in the resistance value of the metal material. When the metal material is stretched, the length increases, the cross-sectional area decreases, and the resistance value increases; ...

AI Technical Summary

Problems solved by technology

[0013] In order to overcome the deficiency that the existing metal strain gauges cannot detect the strain deflection, the present invention provides a lateral deflector that can measure the lateral deflection of the surface strain and can measure the lateral deflection of the single-sided double-biased sensitive grid. Distributing interdigitated metal strain gauges in the five sensitive grids, especially for measuring the corners and edges of the workpiece where the size of the strain gauges is limited or other lateral first-order partial conduction where the strain gauges are not suitable

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