A kind of
band gap measurement method and device, to be measured
semiconductor sample is fixed with temperature sensor
thermal coupling, resistance measurement probe is connected to general measurement interface, identify
probe type and load matching measurement protocol and
correction algorithm, apply
constant current excitation, establish
constant current voltage, temperature acquisition link, real-time acquisition
voltage and conversion resistance, temperature data are synchronously collected, calculate temperature change rate and resistance fluctuation variance, determine measurement scene state and switch sampling period, adjust heating link to realize temperature closed-
loop control, complete full-temperature zone scanning
adaptation.In target temperature interval, at least two groups of different
effective length total resistance are measured to obtain
intrinsic resistance, obtain temperature
intrinsic resistance value pair, slice is carried out to the synchronous acquisition of multiple
physical quantity parameters, environmental error correction is carried out,
linear relationship is constructed based on the corrected data,
band gap is calculated based on the slope and output measurement report, which provides an efficient and reliable technical solution for the accurate measurement of
semiconductor material
band gap.