A gas flow field detection device in a static pressure gas bearing and a method of using the same

Abstract

A gas flow field detecting device in a static pressure gas bearing is composed of the components of a light source (1), a filter plane mirror I (2), a relay lens (3), a high-speed camera (4), a filter plane mirror II (5), a filter prism (6), a microscope objective (7), a connecting tube I (8), a three-way valve (9), a connecting tube II (10), a pressure adjusting valve I (11), a gas compressor I (12), a connecting tube III (13), a pressure adjusting valve II (14), a closed housing (15), tracer particles (16), a connecting tube IV (17), a gas storage tank (18), a connecting tube V (19), a gas compressor II (20), a bearing (21) and a carrying surface (22). The gas flow field detecting device realizes direct detection for the gas flow field in the static pressure gas bearing through photographing the movement track of the tracer particles in a gas film (25) by the high-speed camera (4).

Description

Technical field: [0001] A gas flow field detection device in a static pressure gas bearing and a method for using the same belong to the field of ultra-precision static pressure gas lubrication. Background technique: [0002] Compared with oil lubrication or grease lubrication, hydrostatic gas bearings have small viscosity hysteresis, no friction / very low friction, high precision, long life, low heat generation, and small temperature rise during high-speed motion, which overcomes the failure of lubricating media in traditional bearings. Due to poor thermal stability and other deficiencies, it is widely used in motion support components in the fields of ultra-precision engineering technologies such as lithography exposure, ultra-precision machining, interferometry and semiconductor detection. [0003] With the rapid development of microelectronics manufacturing, ultra-precision machining and ultra-precision measurement technology, higher requirements are placed on the perform...

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Problems solved by technology

[0003] With the rapid development of microelectronics manufacturing, ultra-precision machining and ultra-precision measurement technology, higher requirements are placed on the performance of hydrostatic gas bearings. In order to further study the mechanism of hydrostatic gas lubrication and improve the performance of hydrostatic gas bearings, it is necessary In-depth analysis of the gas flow field characteristics in the bearing. At present, the flow field characteristics in the bearing gas film obtained through numerical analysis and simulation calculation cannot be directly verified by experimental methods. The bearing theory can only be verified indirectly through the bearing capacity, stiffness, gas consumption and other performance of the bearing. analysis results

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