Cryopump
A cryopump and cryopanel technology, which is applied to pumps, liquid variable displacement machines, machines/engines, etc., can solve problems such as unreasonable and increased regeneration time, and achieve the effects of suppressing increase, prolonging regeneration interval, and suppressing regeneration time
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[0020] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, in the following description, the same code|symbol is attached|subjected to the same element, and repeated description is abbreviate|omitted suitably. In addition, the structures described below are examples and do not limit the scope of the present invention.
[0021] figure 1 It is a side cross-sectional view schematically showing main parts of a cryopump 10 according to an embodiment of the present invention. The cryopump 10 is installed, for example, in a vacuum chamber of a vacuum processing device, and is used to increase the degree of vacuum inside the vacuum chamber to a level required by a desired process. The vacuum processing apparatus equipped with the cryopump 10 is, for example, a sputtering apparatus. The process gas pressure in the sputtering device is, for example, in the range of 1 mTorr to 10 mTorr.
[0022] The cryopump 10 ha...
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