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Metal mask and manufacturing method thereof

A technology for a metal mask and a manufacturing method, which is applied in the direction of metal material coating process, ion implantation plating, coating, etc., can solve the problems that restrict the development of AMOLED products, color mixing, and uneven brightness.

Active Publication Date: 2017-12-05
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Especially in the process of assembling the metal mask sheet, if the applied tension is too small, the metal mask sags seriously, and when the tension is increased to make the metal mask in a straight state, defects such as deformation and wrinkles will occur.
At present, FMM (FineMetal Mask) has become the main cause of color mixing and uneven brightness, which greatly restricts the development of AMOLED products.

Method used

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  • Metal mask and manufacturing method thereof
  • Metal mask and manufacturing method thereof
  • Metal mask and manufacturing method thereof

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Embodiment Construction

[0036]The technical solutions in the embodiments of the present disclosure will be clearly and completely described below in conjunction with the accompanying drawings. Referring to the non-limiting exemplary embodiments shown in the accompanying drawings and detailed in the following description, the examples of the present disclosure will be more fully described. Embodiments and their various features and advantageous details. It should be noted that the features shown in the figures are not necessarily drawn to scale. Descriptions of well-known materials, components, and process techniques are omitted so as not to obscure the example embodiments of the present disclosure. The examples are merely intended to facilitate understanding of the implementation of the example embodiments of the present disclosure and to further enable those skilled in the art to practice the example embodiments. Thus, the examples should not be construed as limiting the scope of the example embodi...

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PUM

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Abstract

Embodiments of the present disclosure provide a metal mask and a manufacturing method thereof. The metal mask has opposite first and second main surfaces, and includes a plurality of panel defining regions and main frame parts arranged at intervals. In the defined area of ​​each panel, a plurality of through holes used to define the pixel structure are arranged in a matrix, each through hole communicates with the first main surface and the second main surface of the metal mask, and the side walls of every two adjacent through holes The second main surfaces of the metal mask are directly connected to each other so that the metal mask between two adjacent through holes in the panel-limited area has a thickness D1, the main frame part of the metal mask has a second thickness D2, and the second thickness is D2. The first thickness D1 and the second thickness D2 satisfy |D1‑D2| / D1≤20%.

Description

technical field [0001] Embodiments of the present disclosure relate to a metal mask and a manufacturing method thereof. Background technique [0002] Organic Light Emitting Diode (OLED for short) is an organic thin film electroluminescent device, which has the advantages of easy formation of flexible structure and wide viewing angle. Therefore, the display technology using organic light emitting diodes has become an important display technology. [0003] The full-color display of OLED generally includes R (red) G (green) B (blue) sub-pixels to emit light independently, or a white light OLED combined with a color filter film. Independent light emission of RGB sub-pixels is a color mode widely used at present, especially for the independent light emission of organic light-emitting materials in pixel units. In OLED display technology, the mask plate used in the vacuum evaporation process is very important, and the quality of the mask plate directly affects the manufacturing c...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/04C23C14/24H10K99/00
CPCC23C14/042C23C14/24H10K71/166C23F1/14
Inventor 白珊珊
Owner BOE TECH GRP CO LTD