Quantitative detection device for multi-optical axis parallelism of photoelectric equipment
A technology of quantitative detection and photoelectric equipment, applied in measuring devices, using optical devices, testing optical properties, etc., can solve the problems that the measuring aperture cannot cover multiple optical axes, the measurement error is difficult to extract, and the measurement standard is difficult to determine. Accurate detection of the parallelism of the optical axis of the distance, the effect of small size
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[0021]A photoelectric device multi-optical axis parallelism quantitative detection equipment, including off-axis folding aspheric optical system, CCD image sensor 5, two-dimensional translation stage 6, pentaprism assembly 8, bracket group 7 and control system, the off-axis The folded double-mirror optical system includes a housing 1, an aspheric primary mirror 2, an aspheric secondary mirror 3, and a turning prism group 4. The aspheric primary mirror 2 and the aspheric secondary mirror 3 in the housing 1 form a collimated light pipe. Both the aspheric primary mirror 1 and the aspheric secondary mirror 2 adopt hyperboloid reflectors to form an off-axis Cassegrain type collimator, the curvature of the aspheric primary mirror 2 is -400.17mm, and the off-axis amount is 102.5, The curvature of the aspheric secondary mirror 3 is -129.77 mm, and the off-axis distance is 24 mm. The distance between the aspheric primary mirror 2 and the aspheric secondary mirror 3 is 153 mm. The cross...
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