Capacitive Linear Encoder

Abstract

Capacitive linear encoders. A capacitive linear encoder (100) for determining position comprising: a scale (3); and a readhead (1) for capacitively scanning said scale (3), wherein the scale (3) and The read heads (1) are movable relative to each other. The scale (3) has at least one, preferably capacitive, position reference marker (4, 4a to 4d). Based on the position reference provided by the capacitive position reference markers (4, 4a to 4d), the position is positionable in absolute relation and verifiable.

Description

technical field [0001] The present invention relates to capacitive linear encoders, to methods for determining position precisely using such linear encoders, and to computer program products. Background technique [0002] Linear encoders for precise distance measurement are required in many fields of application where the position of a part movable along a linear path is to be determined, for example the position of a machine component on a linear axis. The position detected in this case can be used as a position value for measuring purposes or for positioning components by means of a drive with a position control loop. Such linear position encoders are thus found in devices such as coordinate measuring machines (CMM), geodetic devices, robotic arms or hydraulic actuators. [0003] For this purpose, a linear encoder includes a scale and a read head for scanning or reading the scale, the scale and the read head are movable relative to each other in the feed direction, and th...

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