Capacitive linear encoder

Abstract

The invention provides a capacitive linear encoder. The capacitive linear encoder(100) for determining positions comprising a scale(3) and a read head(1) for capacitively scanning the scale, wherein scale(3) and read head(1) are movable relative to one another. The scale(3) has at least one, preferably capacitive, position reference marker(4,4a to 4d). On the basis of the position references provided by the capacitive position reference marker(4,4a to 4d), the positions are locatable in absolute terms and verifiable.

Description

Technical field [0001] The present invention relates to a capacitive linear encoder according to the preamble of claim 1, to a method for accurately determining a position using such a linear encoder according to claim 12, and to a computer program product according to claim 15 . Background technique [0002] In many applications where the position of a component that can move along a linear path (for example, the position of a machine component on a linear axis) is to be determined, a linear encoder for precise distance measurement is required. In this case, the detected position can be used as a position value for measurement purposes, or for positioning the component by means of a drive with a position control loop. Such linear position encoders are therefore found in devices such as coordinate measuring machines (CMM), geodetic devices, robotic arms or hydraulic actuators. [0003] To this end, the linear encoder includes a scale and a reading head for scanning or reading the...

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