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Terahertz near-field detector, photoconductive antenna and manufacturing method thereof

A photoconductive antenna, terahertz technology, applied in the terahertz field, can solve problems such as limited diffraction limit

Active Publication Date: 2017-07-18
SHENZHEN CCT THZ TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Among them, in the far-field detection, the imaging resolution formula ρ=Rλ / D shows that as the imaging distance decreases, the spatial resolution continues to improve, but limited by the diffraction limit, the highest can only reach 2D

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  • Terahertz near-field detector, photoconductive antenna and manufacturing method thereof
  • Terahertz near-field detector, photoconductive antenna and manufacturing method thereof
  • Terahertz near-field detector, photoconductive antenna and manufacturing method thereof

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Embodiment Construction

[0029] Such as figure 1 As shown, the terahertz near-field detector 10 provided by an embodiment of the present invention is used to receive a terahertz wave 200 emitted by a terahertz radiation source. The terahertz wave 200 passes through a sample 201 and is generated by the terahertz near-field detector. 10 Imaging to realize the detection of the sample 201. Before passing through the sample 201, the terahertz wave 200 is focused by a super-hemispherical silicon lens 202, so that the terahertz wave 201 can be better collected in the terahertz near-field detector 10. Also refer to figure 2 The terahertz near-field detector 10 includes a photoconductive antenna 11, a lens 12 and an adjustment frame 13. The photoconductive antenna 11 and the lens 12 are combined to form a photoconductive probe. The photoconductive probe is arranged on an adjustment frame 13, and the adjustment frame 13 can adjust the distance between the sample 201 and the photoconductive probe, so as to compl...

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Abstract

This invention relates to a terahertz near-filed detector, a photoconductive antenna and a manufacturing method of the photoconductive antenna. The photoconductive antenna comprises a substrate; a low-temperature GaAs wave plate layer bonded to the substrate; a dipole antenna, which is bonded to the low-temperature GaAs wave plate layer and is a low-temperature grown GaAs slice; an insulation layer placed on the dipole antenna; and a perforated metal plate placed on the insulation layer. The perforated metal plate can dramatically attenuate background noise to improve the spatial resolution of near-field detection.

Description

Technical field [0001] The present invention relates to the technical field of terahertz, in particular to a terahertz near-field detector, a photoconductive antenna used in the terahertz near-field detector, and a manufacturing method of the photoconductive antenna. Background technique [0002] With the continuous development of terahertz technology, the use of terahertz time-domain spectroscopy for imaging has attracted more and more attention. Terahertz time-domain spectral imaging has good application prospects in security inspection, space remote sensing, non-destructive testing of materials, high-resolution terahertz microscopy and other fields. A typical terahertz time-domain spectroscopy system mainly includes four parts: femtosecond pulse radiation source, time delay system, terahertz radiator, and terahertz detector. Among them, the femtosecond pulse radiation source outputs a femtosecond laser pulse, which is divided into pump light and probe light through a fiber sp...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01Q1/22H01Q1/38G01N21/3586
CPCG01N21/3586H01Q1/22H01Q1/38H01Q9/285
Inventor 丁庆彭世昌潘奕李辰
Owner SHENZHEN CCT THZ TECH CO LTD
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