Instantaneous vacuum supply device

Abstract

The invention discloses an instant vacuum providing device, which comprises: at least one chamber, which communicates with the cavity of a vacuum object, and an opening and closing unit is arranged between the chamber and the cavity; a vacuum pump, which passes through a pipeline The chamber is connected; the vacuum degree measurement part and the vacuum degree adjustment part are arranged on the pipeline, the chamber and / or the cavity respectively; the processing control part is electrically connected to the vacuum degree measurement part and the vacuum degree adjustment part, and the vacuum degree measurement part The real-time measurement of the vacuum degree in the chamber and feedback to the processing control part, the processing control part will compare the real-time measured vacuum degree with the required vacuum degree, and control the vacuum degree adjustment part to adjust the vacuum degree in the chamber to the required vacuum degree required vacuum. Compared with the prior art, the present invention can obtain an instant vacuum environment for a cavity requiring a vacuum environment under the premise of low cost and high efficiency, and at the same time, it can control the degree of vacuum more precisely.

Description

technical field [0001] The invention relates to a vacuum providing device, in particular to an instant vacuum providing device. Background technique [0002] In the process of scientific research and production, many research experiments and processes are carried out in vacuum equipment. Generally, vacuum is obtained by using different vacuum pumps or pump groups, or by using vacuum generators, etc., but vacuum pumps are connected to equipment through thin pipelines, and vacuum control valves are added to the pipelines, so that the vacuum is obtained slowly. Moreover, the control is difficult to be precise, and it is easy to overshoot, which cannot meet the requirements of some scientific research or production processes that require instant vacuum and precise control. In addition, it is realized by increasing the large-scale vacuum pump group, but the cost is too high and the vacuum degree is uncontrollable. Contents of the invention [0003] In order to solve the above...

AI Technical Summary

Problems solved by technology

Generally, vacuum is obtained by using different vacuum pumps or pump groups, or by using vacuum generators, etc., but vacuum pumps are connected to equipment through thin pipelines, and vacuum control valves are added to the pipelines, so that the vacuum is obtained slowly. Moreover, the control is difficult to be precise, and it is easy to overshoot, which cannot meet the requirements of some scientific research or production processes that require instant vacuum and precise control.

In addition, it is realized by increasing the large vacuum pump group, but the cost is too high and the vacuum degree is uncontrollable

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