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GUI device for pattern drawing device, pattern drawing system, job ticket update method, and recording medium

A technology of job orders and patterns, which is applied in the direction of exposure device of photo-plate making process, photo-plate-making process of patterned surface, input/output process of data processing, etc., can solve the problem of increasing number of job orders, etc.

Active Publication Date: 2019-06-07
DAINIPPON SCREEN MTG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In order to prevent this problem, I thought of creating a new work order when the design data was updated, but this method increased the number of work orders.

Method used

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  • GUI device for pattern drawing device, pattern drawing system, job ticket update method, and recording medium
  • GUI device for pattern drawing device, pattern drawing system, job ticket update method, and recording medium
  • GUI device for pattern drawing device, pattern drawing system, job ticket update method, and recording medium

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Experimental program
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Embodiment Construction

[0055] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0056]

[0057] figure 1 It is a diagram showing a figure drawing system 400 including the pattern drawing system 4 as one embodiment of the present invention. The pattern drawing system 400 selectively exposes, for example, a photoresist film on a circular semiconductor substrate (hereinafter referred to simply as "substrate"), and directly draws a pattern corresponding to a circuit pattern on the photoresist film. graphics system.

[0058] The graphic drawing system 400 includes a design data creating device 1 , an image processing device 3 , and a direct drawing device 100 connected to each other via a network N such as a LAN. The image processing device 3 has a GUI device 2 .

[0059] The design data creation device 1 is a device for creating and editing data describing a pattern area to be drawn on a substrate to be drawn. Specifically, the data is graphic data...

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PUM

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Abstract

Provided are the following: a GUI device for a pattern rendering device, the GUI device enabling the desired job ticket to be easily selected and update work to be conducted when updating the job ticket following the updating of design data; a pattern rendering system; and a job ticket updating method and program. The GUI device for a pattern rendering device is used when updating a job ticket which defines a series of processes for generating rendering data from design data, wherein the following are provided: a display unit having a screen; an operation unit for operating the screen of the display unit; and a display control unit for controlling the screen display of the display unit. An input section (82) into which an updated update-design-data name is input is displayed, and a job ticket list (83) related to the input update-design-data name is displayed. For an object-of-update job ticket which is displayed with emphasis, from among the job tickets (83), an update button (91) for instructing design data to be replaced with updated design data is displayed.

Description

technical field [0001] The present invention relates to a Graphical User Interface device (GUI device) used in a pattern drawing device for drawing a pattern such as a wiring pattern on a substrate or the like on which a photoresist film is formed. Background technique [0002] Conventionally, various substrates such as semiconductor substrates, printed circuit boards, and glass substrates have been irradiated with light transmitted through a photomask to form a pattern. In recent years, in order to cope with the formation of various patterns, a technique of directly irradiating spatially modulated light onto a substrate to draw a pattern without using a photomask and performing an exposure process has been adopted. [0003] A pattern drawing device that performs exposure processing as described above is called a direct drawing device, and for example, a GUI device for a direct drawing device is described in Patent Document 1 (for example, paragraph 0043 and figure 1 ). Th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G06F3/0481G03F7/20H01L21/027
CPCG03F7/70525
Inventor 古川至中井一博北村清志
Owner DAINIPPON SCREEN MTG CO LTD