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Method for displacing at least one optical component

A technology for optical components and optical components, which is applied to optical components, optics, opto-mechanical equipment, etc. to achieve the effects of reducing average electrical power loss, minimizing total power consumption, and simplifying position adjustment

Active Publication Date: 2016-10-12
CARL ZEISS SMT GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] Predefining the maximum power consumption during movement limits the maximum electrical power provided

Method used

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  • Method for displacing at least one optical component
  • Method for displacing at least one optical component
  • Method for displacing at least one optical component

Examples

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Embodiment Construction

[0093] First, the basic configuration of the projection exposure apparatus 1 will be described below with reference to the drawings. The invention is described in particular with respect to such a projection exposure apparatus 1 . However, the invention generally applies to electromechanical systems whose mechanical elements change their moving positions at regular intervals. The invention is particularly concerned with electromechanical systems whose mechanical elements are intended to change their moving position in an interconnected arrangement. In this case, the mechanical element may in particular be a mirror element of a multi-mirror array, in particular with micromirrors, for example.

[0094] figure 1 A meridional cross-section of a projection exposure apparatus 10 for microlithography is schematically shown. In addition to the radiation source 3 , the illumination system 2 of the projection exposure system 1 has an illumination optics unit 4 for exposing an object ...

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PUM

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Abstract

The present invention relates to a method for displacing an optical component, in which the electrical power maximally required when displacing the component is less than the sum of the maximum electrical powers of the at least two actuators used for the displacement.

Description

[0001] Cross References to Related Applications [0002] The content of priority application DE102014202755.1 is hereby incorporated by reference. technical field [0003] The invention relates to a method of moving at least one optical component. The invention also relates to an optical component and a method of designing an optical component. Furthermore, the invention relates to an illumination optics unit, an illumination system for a projection exposure system, and a projection exposure system. Finally, the invention relates to a method for producing a microstructured or nanostructured component and a correspondingly produced component. Background technique [0004] DE 10 2011 006 100 Al discloses a projection exposure apparatus of a multi-mirror array having individual mirrors movable by actuators. [0005] The object of the invention is to improve a method for moving at least one optical component. [0006] This object is achieved by a method according to claim 1 ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20G02B7/18
CPCG02B7/1828G03F7/70075G03F7/70116G03F7/70191G03F7/70266G02B26/0816G02B27/0012G03F7/702
Inventor S.克朗L.伯杰
Owner CARL ZEISS SMT GMBH
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