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Micro nano fiber vibration sensor based on femtosecond laser micromachining

A vibration sensor and femtosecond laser technology, applied in instruments, measuring devices, measuring ultrasonic/sonic/infrasonic waves, etc., can solve the problems of low reflectivity, expensive equipment, weak signal, etc., and achieve small size, small cross-sensitivity, reduced Effect of small bending stiffness

Active Publication Date: 2016-11-16
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The sensor is small in size and can withstand high temperatures of 1000°C, but the equipment required for processing is expensive, and the optical reflective surface is bombarded by ion beams, so it is difficult to make it very flat, resulting in low reflectivity and weak signal

Method used

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  • Micro nano fiber vibration sensor based on femtosecond laser micromachining
  • Micro nano fiber vibration sensor based on femtosecond laser micromachining
  • Micro nano fiber vibration sensor based on femtosecond laser micromachining

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Embodiment 1

[0031] A micro-nano optical fiber vibration sensor based on femtosecond laser micromachining, comprising: a single-mode optical fiber 1, a hollow-core optical fiber 2, and a solid-core optical fiber 3; wherein the solid-core optical fiber 3 is composed of a mass 4 and a cantilever beam 5;

[0032] The single-mode optical fiber 1, the hollow-core optical fiber 2 and the solid-core optical fiber 3 are sequentially fused; the mass block 4 of the solid-core optical fiber 3 is a cylinder, and the diameter of the cylinder is smaller than the inner diameter of the hollow-core optical fiber 2; the hollow-core optical fiber 2 and the solid-core optical fiber The core optical fiber 3 is fixedly connected by a cantilever beam 5;

[0033] The length of the hollow-core optical fiber 2 is 30 μm, the outer diameter is the same as that of the single-mode optical fiber 1 , which is 125 μm, and the inner diameter is 93 μm; the length of the solid-core optical fiber 3 is 20 μm.

[0034] processi...

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Abstract

The invention relates to a micro nano fiber vibration sensor based on femtosecond laser micromachining and belongs to the field of fiber sensing. A single-mode fiber, a hollow fiber and a solid core fiber are welded in sequence. A fiber end face is burned using a femto second laser to form a mass block and a cantilever beam. The mass block is a circular column, and the diameter of the circular column is smaller than the internal diameter of the hollow fiber. The hollow fiber and the solid core fiber are fixedly connected through the cantilever beam. The invention solves the problem that a reflective surface formed when processing the fiber with the femto second laser has a low reflectivity or does not have a reflectivity; a detected vibration direction is parallel to an axial direction of the fiber; the sensor installation is easy; and the vibration sensor is featured by small size, high resonance frequency, high temperature resistance, electromagnetic interference resistance and the like, and can be used for vibration measurement in high temperature environments.

Description

technical field [0001] The invention relates to a micro-nano optical fiber vibration sensor based on femtosecond laser micromachining, belonging to the field of optical fiber sensing. Background technique [0002] In recent years, there has been an increasing demand for vibration monitoring in high-temperature environments, such as monitoring of aero-engines, generators, engines, and motors of large-scale equipment, etc., and the working temperature can reach 1200°C. [0003] Traditional high-temperature vibration sensors can be divided into eddy current type, electromagnetic induction type and piezoelectric effect type according to the principle of converting mechanical vibration signals into electrical signals. Commercial high-temperature vibration sensors made of these principles, such as SHQ-80 of Beihang Technology Institute, 8310 of B.K Company, 6237M69A and 6237M70 of ENDVCO Company, are large in size and cannot realize high-temperature vibration monitoring above 700 ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01H9/00
CPCG01H9/004
Inventor 江毅张柳超姜澜王素梅李晓炜
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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