The invention discloses a manufacturing method of a
femtosecond laser micromachining-based
optical fiber Mach-Zehnder's sensor. The manufacturing method comprises 1, taking a monomode
optical fiber, stripping an
optical fiber coating through a
fiber stripper and
cutting the optical
fiber through a cutter to obtain a neat optical
fiber end surface, 2, carrying out
femtosecond laser micromachining, wherein in
laser micromachining, laser has
wavelength of 800nm, a repetition rate of 1KHz, pulse width of 120fs and the highest output power of 100mW, has the power of about 1mW after passing through a
shutter and an attenuation slice and is focused on the optical fiber end surface through a 20-fold objective lens and the optical fiber is fixed to a 3D
translation table with a precision of 0.1 microns, 3, carrying out
ablation on the optical fiber end surface to obtain a rectangle with width of 28 microns, length of 32 microns and depth of 40-50 microns, wherein a distance between the center of the rectangle and an optical fiber central axis is 18 microns, and 4, cleaning the ablated optical fiber end surface through
alcohol for 1min, and
welding the cleaned optical fiber end surface to the other untreated optical fiber end surface so that air bubbles are formed in the welded optical fiber and the optical fiber Mach-Zehnder's sensor is obtained. The manufacturing method is free of
hydrofluoric acid corrosion and tapering, carries out micromachining on the optical fiber end surface and has the advantages of micromachining safety, fastness, east control, small size and good fastness.