Synchronous monitoring device for femtosecond laser micromachining

A femtosecond laser and monitoring device technology, which is applied in the monitoring field of femtosecond laser micromachining, can solve the problems of difficult control adjustment, cumbersome adjustment steps, difficult control and accurate adjustment of monitoring angle, etc., and achieve the effect of ensuring the monitoring effect

Inactive Publication Date: 2020-11-27
JINAN G WEIKE SCI & TECH
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Problems solved by technology

The two apertures are equal and collinear, and the beam remains fixed; the femtosecond laser is used for microscopic measurement, and then the CCD is used for real-time detection, and then the monitoring CCD is adjusted by using the L-shaped bracket to adapt to different incident angles, and the monitoring and processing workpiece is proces

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  • Synchronous monitoring device for femtosecond laser micromachining
  • Synchronous monitoring device for femtosecond laser micromachining
  • Synchronous monitoring device for femtosecond laser micromachining

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Embodiment Construction

[0031] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention.

[0032] In describing the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", " The orientation or positional relationship indicated by "outside", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, so as to Specific orientation configurations and operations, therefore, are not to be construed as limitations on the invention.

[0033] refer to Figure ...

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Abstract

The invention discloses a synchronous monitoring device for femtosecond laser micromachining, and belongs to the field of monitoring of femtosecond laser micromachining. The synchronous monitoring device for femtosecond laser micromachining comprises an adjusting base, and a machined part is arranged on the adjusting base. The adjusting base is located on one side of a femtosecond laser. A first driving motor is fixedly connected to the adjusting base, a first driving shaft is fixedly connected to the driving end of the first driving motor, a first gear disc is fixedly connected to the first driving shaft, the machined part is located at the center of the first gear disc, and a transmission gear is rotatably connected to the adjusting base through a rotating shaft. According to the synchronous monitoring device, a CCD for monitoring is always vertical to the machined part; and meanwhile, in order to ensure that the CCD for monitoring is accurately aligned to the machining position of the machined part, the monitoring effect during oblique incidence machining and the monitoring effect during vertical incidence machining are kept the same, automatic adjustment is completed at a time,automatic and accurate adjustment is conducted, and the monitoring effect is ensured.

Description

technical field [0001] The invention relates to the technical field of monitoring femtosecond laser micromachining, in particular to a synchronous monitoring device for femtosecond laser micromachining. Background technique [0002] The femtosecond laser is a kind of laser that operates in the form of pulses. The duration is very short, only a few femtoseconds. A femtosecond is 10 minus 15 seconds, which is 1 / 1000 trillion seconds. The shortest pulse obtained by this method is several thousand times shorter. The second feature of the femtosecond laser is that it has a very high instantaneous power, which can reach one million gigawatts, which is a hundred times more than the current total power generated in the world; The third feature of the laser is that it can focus on a space area smaller than the diameter of the hair, so the femtosecond laser has a good application prospect in fine and micro processing. Real-time monitoring of workpiece processing status, such as the a...

Claims

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Application Information

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IPC IPC(8): B23K26/00B23K26/70
CPCB23K26/00B23K26/70B23K26/707
Inventor 蒋习锋王明利
Owner JINAN G WEIKE SCI & TECH
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