Synchronous monitoring device for femtosecond laser micromachining

Abstract

The invention discloses a synchronous monitoring device for femtosecond laser micromachining, and belongs to the field of monitoring of femtosecond laser micromachining. The synchronous monitoring device for femtosecond laser micromachining comprises an adjusting base, and a machined part is arranged on the adjusting base. The adjusting base is located on one side of a femtosecond laser. A first driving motor is fixedly connected to the adjusting base, a first driving shaft is fixedly connected to the driving end of the first driving motor, a first gear disc is fixedly connected to the first driving shaft, the machined part is located at the center of the first gear disc, and a transmission gear is rotatably connected to the adjusting base through a rotating shaft. According to the synchronous monitoring device, a CCD for monitoring is always vertical to the machined part; and meanwhile, in order to ensure that the CCD for monitoring is accurately aligned to the machining position of the machined part, the monitoring effect during oblique incidence machining and the monitoring effect during vertical incidence machining are kept the same, automatic adjustment is completed at a time,automatic and accurate adjustment is conducted, and the monitoring effect is ensured.

Description

technical field [0001] The invention relates to the technical field of monitoring femtosecond laser micromachining, in particular to a synchronous monitoring device for femtosecond laser micromachining. Background technique [0002] The femtosecond laser is a kind of laser that operates in the form of pulses. The duration is very short, only a few femtoseconds. A femtosecond is 10 minus 15 seconds, which is 1 / 1000 trillion seconds. The shortest pulse obtained by this method is several thousand times shorter. The second feature of the femtosecond laser is that it has a very high instantaneous power, which can reach one million gigawatts, which is a hundred times more than the current total power generated in the world; The third feature of the laser is that it can focus on a space area smaller than the diameter of the hair, so the femtosecond laser has a good application prospect in fine and micro processing. Real-time monitoring of workpiece processing status, such as the a...

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Problems solved by technology

The two apertures are equal and collinear, and the beam remains fixed; the femtosecond laser is used for microscopic measurement, and then the CCD is used for real-time detection, and then the monitoring CCD is adjusted by using the L-shaped bracket to adapt to different incident angles, and the monitoring and processing workpiece is processed point processing effect, but by manually adjusting the L-shaped bracket, on the one hand, it is difficult to accurately adjust the monitoring angle of the CCD for monitoring, and on the other hand, it is difficult to control the monitoring angle of the CCD for monitoring after adjusting the incident angle. The adjustment steps Trouble

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