A micro-nano optical fiber vibration sensor based on femtosecond laser micromachining
A technology of vibration sensor and femtosecond laser, which is applied in the direction of instruments, measuring devices, and wave/particle radiation, can solve the problems of expensive equipment, low reflectivity, weak signal, etc., and achieve small cross-sensitivity, small size, and reduced The effect of bending stiffness
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[0031] A micro-nano optical fiber vibration sensor based on femtosecond laser micromachining, comprising: a single-mode optical fiber 1, a hollow-core optical fiber 2, and a solid-core optical fiber 3; wherein the solid-core optical fiber 3 is composed of a mass 4 and a cantilever beam 5;
[0032] The single-mode optical fiber 1, the hollow-core optical fiber 2 and the solid-core optical fiber 3 are sequentially fused; the mass block 4 of the solid-core optical fiber 3 is a cylinder, and the diameter of the cylinder is smaller than the inner diameter of the hollow-core optical fiber 2; the hollow-core optical fiber 2 and the solid-core optical fiber The core optical fiber 3 is fixedly connected by a cantilever beam 5;
[0033] The length of the hollow-core optical fiber 2 is 30 μm, the outer diameter is the same as that of the single-mode optical fiber 1 , which is 125 μm, and the inner diameter is 93 μm; the length of the solid-core optical fiber 3 is 20 μm.
[0034] processi...
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