37 results about "Laser micromachining" patented technology

The invention discloses an additive manufacturing intelligent repairing and surface optimizing method for a complex special-shaped curved surface, and particularly relates to the technical field of additive manufacturing. A three-dimensional digital model is obtained, and a complex special-shaped curved surface defect area is recognized; extracting a local morphology parameter set; constructing a repair path generation model based on a graph neural network, and performing collaborative optimization of forming precision, residual stress and deposition stability on the path through a multi-objective optimization algorithm; additive manufacturing equipment is controlled to perform material deposition according to the optimized path; carrying out online error detection by adopting a structured light system, judging repair quality through a fuzzy decision tree model, and triggering path reconstruction if the repair quality exceeds a threshold value; after repairing is completed, surface micro texture factors are extracted, and functional texture regulation and control are conducted through the laser micromachining technology; according to the method, high-precision intelligent repair of the complex curved surface area and collaborative improvement of surface function performance are achieved, and the method is suitable for the fields of aerospace, energy, high-end equipment manufacturing and the like.

The invention relates to the technical field of medical equipment, in particular to a preset tooth cutting method and system based on image data, and the method comprises the following steps: S1, obtaining multi-modal image data by using CT (Computed Tomography), MRI (Magnetic Resonance Imaging) and optical scanning technologies, and carrying out consistent analysis after preprocessing; and S2, performing automatic image segmentation by using a deep convolutional neural network (CNN). S3, optimizing the implant design through a generative adversarial network (GANs); s4, simulating and optimizing a cutting path through an augmented reality (AR) environment; and S5, laser micromachining is used for surface treatment of the implant. According to the method, the dentin cutting scheme matched with the specific shape and size of the bone defect area is designed through the data generated by scanning the three-dimensional shape of the complete tooth in advance, so that the image definition and the diagnosis accuracy are improved, the preoperative analysis is more accurate, and the subsequent personalized treatment design is effectively supported.

The invention relates to the technical field of laser micromachining, in particular to a laser ablation titanium alloy numerical simulation method based on a plasma shielding effect. In order to solve the problems that the precision and efficiency of an existing laser processing and manufacturing micro-nano structure are low, the plasma shielding effect is not fully considered in a simulation model and the like, two-dimensional and three-dimensional models are constructed by means of COMSOL Multiphysics software. According to the model, the plasma shielding effect is fully considered, a laser energy transfer equation is corrected, and the molten pool behavior and surface topography forming process is simulated by combining mass, momentum and energy conservation equations. A laser ablation process is accurately simulated by setting a heat source and boundary conditions, applying a level set method, considering various effects and calculating plasma related parameters. And inputting different laser parameters to simulate and analyze the influence on the groove morphology, and comparing an experiment with a simulation result to correct the model. Simulation precision is improved, laser processing parameters can be optimized, cost is reduced, universality is high, theoretical guidance can be provided for laser processing of various metal materials, and the laser processing technology is promoted to be developed in multiple fields.

The liquid-assisted micromachining methods include methods of processing a substrate made of a transparent dielectric material. A working surface of the substrate is placed in contact with a liquid-assist medium. A pulsed laser beam is generated and separated into a plurality of beamlets that are formed into a plurality of focus spots that have a fluence to induce multiphoton absorption in the transparent dielectric material. The plurality of focus spots are moved from an initial position in the liquid-assist medium through the substrate and simultaneously moved in one or more directions perpendicular to an optical axis so that each of the plurality of focus spots independently modifies the material along a separate modification path in a continuous volume of the transparent dielectric material. The continuous volume is removed from the substrate to form a feature in the substrate. Optical components formed using the processed substrate are also disclosed.

The invention provides a conical hole machining method and device, relates to the technical field of laser micromachining, and aims at optimizing a conical hole on the basis of a machining method of matching laser modification with chemical corrosion, so that compared with the prior art, the phenomenon that large-size edge breakage is easily generated in the machining process can be effectively relieved, and the machining efficiency is improved. And the taper hole with the taper and the smooth inner wall can be obtained, and the diversified requirements of packaging scenes are met.

The invention relates to the technical field of laser micromachining, and provides a laser beam splitting self-driving abrasive particle assisted laser machining method and system which comprises a laser system, a coaxial annular nozzle, a carrying device and a liquid supply device. The coaxial annular nozzle comprises an inner nozzle and an annular liquid cavity surrounding the outer wall of the inner nozzle; the liquid supply device sprays liquid to the surface of the to-be-machined part through the annular liquid cavity. A laser beam emitted by the laser system is emitted through the inner nozzle; the laser system is provided with a beam splitting adjusting module capable of adjusting the energy and the focus space position of each laser beam after beam splitting, a first part of the laser beams after beam splitting of the beam splitting adjusting module are used for machining a to-be-machined material, and a second part of the laser beams are used for inducing cavitation bubbles to collapse in a solution to generate impact driving force. Multiple control over the laser energy space can be achieved, efficient material removal can be achieved, and abrasive particles can be actively controlled to participate in machining cooperation through a laser driving auxiliary unit.

The invention relates to a manufacturing method of a refractive index sensor of an external cavity type optical fiber Fabry-Perot interferometer, which utilizes a laser micromachining forming technology, can realize micron-sized accurate optical fiber machining, and can effectively improve the process consistency and long-term reliability of a final sensor product in cooperation with a fine adjustment displacement table, an electron microscope and a real-time imaging display system. Aiming at a hollow-core quartz tube optical fiber part in the sensor, the invention provides a novel open type Fabry-Perot interference cavity structure through laser processing, and the interaction between a light field and an external medium can be enhanced, so that the detection efficiency and sensitivity of the sensor on refractive index change are remarkably improved. Correspondingly, the invention further provides the sensor manufactured by the method and manufacturing equipment for executing the method, and the sensor and the manufacturing equipment have low cost and high universality and expansibility.

Embodiments of methods and systems for liquid-assisted laser micromachining of a substrate are provided. A laser beam of a laser is directed at a substrate disposed in a liquid-assist medium. The substrate has a first major surface, a second major surface, and a body extending from the first major surface to the second major surface. The liquid-assist medium at least partially covers the second major surface. A focal point of the laser beam is moved along a path through the body from the second major surface toward the first major surface. The body of the substrate is removed along the path to define a cavity. The liquid-assist medium has a surface tension, and the laser pulses the laser beam at a repetition rate (F), in kHz, based on the surface tension (σ), in dyn / cm, according to F = [3.52 + 0.085σ + 0.002e 0,21(σ-37.8)] ± 0.8.

The invention discloses a measurement method and system for multi-laser cooperative detection of nanobubbles, and belongs to the technical field of nanobubble measurement and detection. Through the excitation-detection double-laser system, key data such as the size, the service life and the formation threshold value of the nanobubbles are obtained in real time, the limitation of the traditional optical microscopic imaging resolution ratio is broken through, and the measurement precision is improved. Time-resolved imaging and thermal lens measurement are combined to realize omnibearing bubble monitoring. A time-resolved imaging technology is adopted to obtain information such as nucleation and collapse change of the nanobubbles. And in combination with thermal lens effect measurement, multi-angle measurement is realized. The generation of nano bubbles is accurately regulated and controlled, and laser processing and biological application are optimized. By adjusting parameters, controllable generation of nano bubbles is optimized, and the method is suitable for laser micromachining, microfluidic control, biomarking and other applications. In addition, the method is non-contact optical measurement, electrode or other external intervention is not needed, and the applicability is improved.

The utility model relates to the technical field of laser micromachining, and discloses an adjustable light guide structure for laser micromachining, which comprises a reflecting mirror body, a mounting seat, a large bevel gear and a small bevel gear, a first adjusting rod is horizontally and fixedly mounted at one end of the reflecting mirror body, and an adjusting groove is formed in the mounting seat. According to the utility model, through combination of the motor, the second adjusting rod, the bevel pinion, the bevel gear wheel and the first adjusting rod, the motor is controlled to work, the bevel pinion can be driven to rotate, the bevel gear wheel can drive the reflector body fixedly connected with the first adjusting rod to rotate, and the use angle is adjusted; the light guide structure for laser micromachining can detect the number of turns of rotation of the bevel pinion, so that the adjusting angle of the bevel gear wheel is accurately controlled, and the problem that the use angle of the reflector body is inconvenient to accurately adjust in an existing light guide structure for laser micromachining is further solved.

The invention relates to a countersink blade, a countersink and a manufacturing process of the countersink blade, and belongs to the field of countersinks, the countersink blade is provided with a cutting edge part, the cutting edge part is provided with a row of sawteeth, and the tooth bottoms and the tooth tops of the sawteeth are subjected to rounding treatment; the surface, facing a workpiece, of the blade in the machining process is constructed to be a first inclined face, and a row of sawteeth are located on the first inclined face. And the blade is made of PCD (Polycrystalline Diamond). The countersink blade is provided with the sawteeth, so that the countersink can machine high-precision concentric lines on the end face of a hole at a time, the machining efficiency and quality of the concentric lines are greatly improved, the stability and consistency of the concentric lines are good, and the assembling quality of bolt connecting pieces in the later period is guaranteed; the method has the advantages that the structure is simple, the blade roughness can be customized according to customer requirements, the differentiated machining requirements are met, the microcosmic sawtooth shape of the countersink blade is accurately designed by matching with the laser micromachining technology, and the high-precision concentric line structure and the high-precision and long-life cutting performance are formed.

The invention discloses a preparation method of a sealing strip for an anti-noise automobile window imitating dragonfly wing characteristics. The preparation method comprises the following steps: S1, extracting bionic characteristics: acquiring saw-toothed structures at the front edges of dragonfly wings and boss texture structure characteristics of wing surfaces; s2, designing a bionic structure of the sealing strip: designing a micro-sawtooth structure on the upper edge of the sealing strip, and designing a multilateral boss array structure on the inner surface of the sealing strip; s3, laser micromachining is conducted, specifically, a micro-sawtooth structure and a multilateral boss array structure are machined on the upper edge and the inner surface of the sealing strip correspondingly; s4, verifying the noise reduction performance; and S5, friction abnormal sound testing. The design principle is based on cross innovation of a bionics theory and a precision laser processing technology, and noise reduction optimization of the automobile sealing strip is achieved through function deconstruction and engineering reconstruction of dragonfly biological characteristics. The sealing strip has the composite protection function of aerodynamic noise reduction and mechanical vibration damping under the dynamic working condition through double bionic effect and friction coefficient optimization.

The invention discloses a method for solving ultra-yield strength cracks in cold stamping of an arc-shaped bent sheet, and relates to the technical field of textile materials, the method comprises the following steps: preparing a mold surface with an amorphous metal glass-based gradient pore channel structure; carrying out plate defect seed implantation pretreatment; a pulse load coupling stamping process is adopted; according to the method, a composite mechanism of stress dissipation and deformation guide is formed by constructing a cross-scale structure of a nano groove and a micron boss and introducing nano particles, and fiber deformation gradient dispersion stress is constructed by combining laser micromachining of a nano pit defect seed to guide directional closing of the groove and mold roughness difference; the invention has the advantages of simple structure, low-temperature dynamic load and shape memory alloy microcolumn phase change triggered rapid closing mechanism, breakthrough of traditional process limitation, great reduction of snagging occurrence rate, improvement of wear resistance times and fatigue life, no need of fiber modification, low equipment modification cost, compatibility with multi-material systems and the like, and enhances friction force between fibers.

The invention provides a metal material deformation localization evolution characterization method based on image processing, which comprises the following steps: (1) etching grid lines on the surface of a metal material sample by using a laser micromachining technology, and carrying out high-speed impact loading on the sample to be tested after laser micromachining, recording an original image of grid line deformation on the surface of the to-be-detected sample by using a high-speed camera; (2) carrying out filtering and noise reduction processing on the obtained original image with the deformed grid lines, and selecting and identifying the grid lines; (3) extracting coordinates of each pixel point of the grid lines, and performing polynomial fitting on the coordinates of the pixel points to obtain displacement of each point of the grid lines; and (4) performing first-order derivative derivation on the polynomial obtained by fitting to obtain a whole-process image of deformation localization evolution of the surface of the sample to be detected. The method is simple and easy to operate, automatically recognizes and extracts feature points, does not need complex parameter setting, is high in result accuracy, and can visually and efficiently obtain deformation field information under the high-speed impact condition.

Optical assembly for generating the second and third harmonic frequencies of a laser beam using two optically nonlinear crystals (C1 and C2) placed in a temperature-controlled environment. The first optically nonlinear crystal (C1) converts the fundamental harmonic frequency to the second harmonic, while the second optically nonlinear crystal (C2) converts the fundamental and second harmonics to the third harmonic. The system includes beam intensity attenuation mechanisms using a first half-wave plate (HWP1) and first and second polarizers (P1, P2) that direct the beam according to the user's requirements. Motorized linear shifts (T1, T2) provide switching between harmonic frequency generation modes. Different cuts of the optically nonlinear crystals (C1 and C2) allow for optimization of phase matching and conversion efficiency. This assembly is designed for highly accurate and flexible generation of harmonic laser beams with wide industrial applications, especially in laser micromachining.

The invention discloses a regenerative amplifier based on a slab medium and a double-end pumping configuration, and belongs to the technical field of laser technologies and photoelectric devices. The regenerative amplifier comprises a seed source, a modulator, an amplifier, an isolator, a polarization control element, an electro-optic Q-switched crystal, a slab laser crystal, a double-end pumping system and a resonant cavity structure. The amplifier adopts the lath gain medium, heat sinks are bonded on the upper surface and the lower surface to improve the heat dissipation efficiency, the pump light is uniformly distributed in the crystal in combination with a double-end symmetric pumping mode, and the energy utilization rate and the light beam quality are improved. Seed light reciprocates in the resonant cavity for multiple times, and after multi-pass amplification and energy accumulation, cavity emptying is achieved through electro-optical Q-switching control, and high-peak-power laser pulses are output. The problems that a traditional regenerative amplifier is serious in heat effect, uneven in gain, limited in output power and the like are effectively solved, and the regenerative amplifier is suitable for the high-energy laser application fields such as laser micromachining and ultrafast spectrums.

The invention belongs to the technical field of medical manufacturing, and particularly relates to a technological preparation method of an intestinal obstruction catheter with a polyurethane catheter grafted with a silica gel balloon. Comprising the following steps: (1) co-extrusion molding of a pipe body: carrying out melt extrusion on polyurethane particles containing an antistatic agent and a nano-antibacterial agent through a twin-screw extruder, molding by adopting a multi-section gradient temperature control mold, and then carrying out four-stage temperature gradient cooling and shaping; (2) constructing a multi-cavity structure: forming 2-4 independent cavity channels by rapidly switching a core mold system; (3) balloon grafting: sleeving the prevulcanized silica gel balloon at the far end of the catheter; (4) functionalization treatment, wherein a heparin-silicone oil composite coating is sprayed on the surface of the catheter in a plasma spraying mode, and silane coupling agent modified nanometer titanium dioxide is loaded in the coating; and (5) tube body modification: carrying out laser micromachining on anti-skid lines and arranging a platinum-iridium alloy developing ring at the tip of the intestinal obstruction catheter. The anti-infection performance of the catheter is remarkably improved through a synergistic antibacterial mechanism, the balloon can be tightly combined with the catheter all the time, and safety and durability are achieved.

This invention belongs to the field of laser micromachining and relates to a coaxial monitoring system for ultrafast laser micromachining. The system includes an ultrafast laser, a beam-splitting plate, a laser focusing lens, an intermediate lens group, a filter, a fixed-magnification telecentric lens, and a high dynamic range camera. The ultrafast laser emits ultrafast laser light. The beam-splitting plate and the laser focusing lens are arranged sequentially from front to back along the optical path of the ultrafast laser. The laser focusing lens focuses the ultrafast laser light onto the workpiece, generating visible monitoring light on the workpiece. The visible monitoring light passes through the laser focusing lens and is reflected by the beam-splitting plate to form reflected visible monitoring light. The intermediate lens group, filter, fixed-magnification telecentric lens, and high dynamic range camera are arranged sequentially from front to back along the optical path of the reflected visible monitoring light. This invention provides a coaxial monitoring system for ultrafast laser micromachining that improves imaging clarity and resolution.

The invention belongs to the technical field of water-jet guided laser micromachining, and particularly discloses a miniature water-jet guided laser machining head which comprises a laser emitting and collimating assembly used for generating laser beams and collimating the laser beams into parallel beams; the polarization regulating and focusing assembly is used for regulating the polarization state of the parallel light beams and focusing the regulated parallel light beams; the water-guided coupling assembly is used for coupling the focused parallel light beams and the micro water jet to form water-guided laser beams for processing and reflecting the water-guided laser beams to form reflected laser beams; and the reflected light monitoring assembly is used for monitoring the coupling state of the water-guided laser beam in real time based on the reflected laser beam. Miniaturization of an existing water-jet-guided laser machining head can be achieved, and the water-jet-guided laser machining head can be separated from a machine tool to be independently used.

The invention relates to the field of laser micromachining technology, and discloses a laser-based special-shaped micro-hole spinneret processing process, which includes the following steps: S1, preparing a workpiece and a nanostructure coating; S2, using a nanophotonic lens to control the wavefront of the laser beam; S3, using a tunable nano-laser source to adjust the laser wavelength according to material characteristics; S4, using an adaptive optical component to adjust the laser wavefront in real time; S5, controlling the arrangement of nanomaterials through an electric field; S6, real-time monitoring of key parameters in the micro-hole processing process. By applying nanophotonic lenses, adaptive optical components, tunable nano-laser sources, intelligent adaptive control systems and electric field-assisted technologies, the problems of inaccurate laser beam focusing, poor material adaptability, untimely parameter adjustment and insufficient nano-material arrangement accuracy existing in traditional laser micromachining technologies are solved, the processing accuracy and stability are significantly improved, and the application range of materials is expanded.

The invention relates to a self-masking flexible sensor and a preparation method thereof, and belongs to the technical field of advanced electronic materials, flexible sensors and laser micromachining. The sensor is composed of a flexible insulating substrate, a functional thin film layer and an insulating protective layer, wherein the flexible substrate adopts an adhesive film with a bottom film; the functional layer is formed through a thick film printing or physical vapor deposition process; the insulating protection layer is prepared through a latex film forming method or a vapor deposition process. According to the preparation method, a purple picosecond laser mask processing technology is adopted, magnetron sputtering, atomic layer deposition and other processes are combined, and a functional group on the surface of the substrate is activated by optimizing laser parameters so as to enhance the adhesive force. According to the scheme, the traditional photoetching process steps are remarkably simplified, the production cost is reduced, meanwhile, the conductivity, the insulating property and the environmental stability of the sensor are improved, the sensor is suitable for the fields of wearable equipment, industrial monitoring, electronic skin and the like, and the core problems that in the prior art, the process is complex, the material adaptability is insufficient and the environmental compatibility is poor are solved.

The invention discloses an integrated four-wire system test probe based on an electroforming process and a preparation method thereof.The test probe comprises a middle insulating layer and metal conductors symmetrically distributed on the two sides of the middle insulating layer, and conductive seed layers are arranged on the outer surfaces, close to the two sides of the metal conductors, of the middle insulating layer; the projections of the middle insulating layer and the metal conductor on the horizontal plane coincide, the metal conductor and the middle insulating layer are integrally formed through an electroforming process, the middle insulating layer adopts an ultrathin flexible insulating film, the metal conductor adopts metal alloy with high strength, high wear resistance and good conductivity, and the middle insulating layer is one of polyimide, polyethylene naphthalene or polyester. According to the invention, an electroforming technology and laser micromachining are combined to manufacture the integrated four-wire system test probe with micron-order precision, the integrated four-wire system test probe can be directly inserted into a female terminal, stable and reliable double-point contact is realized, and the application bottleneck of a four-wire method in female terminal test is solved.

The invention discloses a super-hydrophobic surface based on laser micromachining and UV transfer printing and a preparation method thereof, and belongs to the field of material surface modification.The method comprises the steps that a microstructure template is machined on a high-purity metal nickel plate through picosecond or femtosecond laser, a microstructure is copied to the surface of a target base material with high precision through a circulating UV transfer printing technology, and the super-hydrophobic surface is obtained. Large-area splicing larger than 500 mm * 500 mm is achieved, finally, low-surface-energy nano particle dispersion liquid is sprayed, and a micro-nano graded rough structure is constructed after drying. The static water contact angle of the prepared super-hydrophobic surface is larger than or equal to 150 degrees, the rolling angle is smaller than or equal to 5 degrees, and the contact angle attenuation rate lt after the super-hydrophobic surface is abraded by 600 # abrasive paper 500 times; the coating has excellent mechanical durability, chemical stability and self-cleaning, anti-icing and anti-fouling functions, and is simple in process, low in cost and suitable for industrial large-scale production.

The invention discloses a focusing module for laser micromachining, which comprises a component library, a decision component and an execution component, the component library comprises at least one component including a focus lens and a galvanometer, the focus lens comprises a field lens or an objective lens, the decision component is used for selecting the component from the component library and determining the type of the focus lens according to the machining requirement, and the execution component is used for executing the machining requirement. And the execution component is in communication connection with the decision component and sets the selected components according to a preset sequence. The focusing module can be mounted at the tail end of a light guide arm, is applied to laser micromachining, and can realize two focusing modes, namely a direct focusing mode and a galvanometer scanning mode by selecting different components, so as to cover three-dimensional and two-dimensional bidirectional scenes.

The invention aims to provide a preparation method of an all-polylactic acid-based optical fiber pressure sensor with high stability, which comprises the following steps: preparing a polylactic acid-based pressure-sensitive diaphragm with a multilayer reflection structure, and drawing a polylactic acid-based optical fiber with a core-cladding structure; processing a polylactic acid-based base and a polylactic acid-based perforated plate with through holes; and low-temperature plasma bonding of the assembly is realized through interface activation and precise alignment. The low-temperature bonding has a remarkable improvement effect on the degradation synchronism and the structural stability of the sensor, so that the degradation rate difference of each part is reduced to 12%, and the overall degradation consistency of the sensor in an object is ensured; the laser micromachining technology improves the optical properties of the sensor, such as light transmittance and interference fringe contrast, and effectively enhances the sensitivity of the sensor.

The invention relates to the technical field of laser micromachining, in particular to a method for improving the depth of a femtosecond laser double-beam interference machining super-diffraction limit nano grating, which comprises the following steps of: emitting fundamental frequency femtosecond laser through a femtosecond laser light source; splitting the fundamental frequency femtosecond laser into two paths of coherent light beams, and enabling the two paths of coherent light beams to form an interference pattern with a first period on the surface of the sample; controlling the sample scanning speed to meet a preset relational expression between the sample scanning speed and the repetition frequency of the first period and the fundamental frequency femtosecond laser; part of the fundamental frequency femtosecond laser is converted into frequency-doubled light, the frequency-doubled light generates a frequency-doubled pulse string through a Fabry-Perot resonant cavity, and the frequency-doubled pulse string irradiates the surface of a sample at preset energy flux density and preset sub-pulse time intervals after preset delay time and coincides with an interference pattern area. Therefore, the processing structure meets space phase matching conditions, surface plasmon polariton resonance is excited, and the depth is remarkably improved.

The invention relates to the technical field of fine wire arrangement, in particular to a micro-nano wire arrangement method based on laser processing composite liquid self-assembly. According to the technical scheme, the method comprises the steps of surface pretreatment, substrate laser machining, micro-nano wire fixing and liquid loading and scraper driving and assembling, specifically, a to-be-machined substrate is cleaned, a lyophobic coating is sprayed, and a lyophobic surface is formed; by combining a laser micromachining technology and a fluid interface regulation and control mechanism, the defects of traditional mechanical clamping and electric field / magnetic field driving technologies are overcome, the method can be suitable for assembling micro-nano wires of various materials and various sizes, a large-scale and damage-free micro-nano wire assembling scheme with material universality is provided, and the method is suitable for large-scale production of the micro-nano wires. The method can be combined with micro-nano photoelectric device manufacturing, and efficient manufacturing and application expansion are achieved in the emerging field of optoelectronic chip and semiconductor manufacturing.

A method of processing a substrate includes disposing the substrate into a liquid-assist medium such that the substrate is in an orientation that is within ten degrees of vertical. The substrate is attached to a mount assembly comprising a window-substrate and one or more spacers located at a surface of the window-substrate. The substrate is attached to the one or more spacers such that a gap is present between a first surface of the substrate and the surface of the window-substrate. The liquid-assist medium is present within the gap and at a back surface of the substrate. The method further includes directing a pulsed laser beam to form a focus spot having an initial position in the liquid-assist medium behind the back surface, and moving the focus spot through a body of the substrate to create a modification that forms a feature.

The invention belongs to the field of laser micromachining, and relates to a coaxial monitoring system for ultrafast laser micromachining, which comprises an ultrafast laser, a light splitting flat plate, a laser focus lens, a middle lens group, a filter, a fixed-time telecentric lens and a high-dynamic camera, the ultrafast laser emits ultrafast laser; the light splitting flat plate and the laser focus lens are sequentially arranged on a light path where the ultrafast laser is located from front to back; the laser focus lens is used for converging the ultrafast laser on a machined part; visible monitoring light is generated on the machined part; the visible monitoring light penetrates through the laser focus lens and then is reflected by the light splitting flat plate to form reflected visible monitoring light; the middle lens group, the filter, the fixed-time telecentric lens and the high-dynamic camera are sequentially arranged on a light path where the reflected visible monitoring light is located from front to back. The coaxial monitoring system for ultrafast laser micromachining provided by the invention can be used for improving the imaging definition and the imaging resolution.

The present invention discloses a manufacturing process for chip diodes, capacitors, and resistors based on a circuit board, comprising the following steps: cleaning and surface activation treatment of a circuit board substrate, removing impurities and oxides on the substrate surface using plasma cleaning technology, and roughening the substrate surface using laser micromachining technology; using multifunctional printing equipment to print functional materials of diodes, capacitors, and resistors onto the pretreated circuit board substrate in one go. The present invention has the beneficial effects of eliminating cumbersome processes in traditional processes such as multiple coatings, baking, and complex wiring; and integrating and optimizing multiple previously dispersed steps through one-time printing of functional materials, combined with in-situ curing and integrated 3D printing and packaging technology, thereby greatly shortening the overall manufacturing cycle and significantly improving production efficiency.