The invention discloses a three-
sandwich type piezoelectric
actuator opposite arrangement type multi-dimensional vibration platform and an excitation method thereof, and belongs to the technical field of precision driving and micro
vibration control, the platform comprises a
tail end platform and three actuating units, the actuating units are distributed around the
tail end platform in a circumferential opposite and mirror symmetry mode, and the whole structure is flat and compact. Each actuating unit is formed by connecting a flexible hinge, an amplitude-change pole, a piezoelectric
actuator, an end cover and a bolt in series, and reliable
pressure stress is provided through bolt pre-tightening. The six-degree-of-freedom high-frequency micro-vibration
output device is characterized in that only phase collaborative excitation of the
bending vibration ceramic group around the Y axis and the
bending vibration ceramic group around the Z axis is utilized, three-direction translation along the X / Y / Z axis and three-direction rotation around the X / Y / Z axis can be achieved without a
longitudinal vibration mode, and six-degree-of-freedom high-frequency micro-vibration output is achieved. The support is arranged in a
modal node area to reduce interference, and the rigidity of the flexible hinge is adjustable to adapt to different working conditions. The platform is particularly suitable for space-limited and high-precision application scenes such as endoscopic instruments, micro-fluidic chips,
laser micromachining and omni-directional active vibration suppression.