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Method and apparatus for producing fibre-optical FP sensor by ultrashort pulse laser fine machining

An ultra-short pulse laser and sensor technology, which is applied in laser welding equipment, metal processing equipment, welding equipment, etc., can solve the problems of low-sensitivity sensors and incompatibility of materials to be tested, and achieve high sensing sensitivity and compatibility Good, high utilization effect

Inactive Publication Date: 2007-09-05
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0005] The purpose of the present invention is to provide a method and equipment for producing optical fiber F-P sensor by ultrashort pulse laser micromachining, which solves the technical problems of low sensitivity of traditional optical fiber F-P sensor and incompatibility of sensor and material to be measured

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  • Method and apparatus for producing fibre-optical FP sensor by ultrashort pulse laser fine machining
  • Method and apparatus for producing fibre-optical FP sensor by ultrashort pulse laser fine machining
  • Method and apparatus for producing fibre-optical FP sensor by ultrashort pulse laser fine machining

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[0035]The schematic diagram of processing equipment for ultrashort pulse laser micromachining optical fiber F-P sensor is shown in Figure 2, mainly including femtosecond laser system, beam control system, real-time monitoring system and focusing system 13 (that is, writing optical head), three-dimensional mobile platform 16, shutter 21 and Computer 15 and CAD control software. In the experiment, the MAITAI self-mode-locked Ti:sapphire femtosecond pulse laser of the American Spectrophysics Corporation was used as the ultrashort pulse laser seed source, and the output single pulse energy was about 10nJ, and the pulse width was 80fs. The amplifier is Spitfire from Spectraphysics, and the pump source is evolution Q-switched-YLF frequency-doubled laser from Spectraphysics. Under 1KHz, 5mJ laser pumping, the output energy is 800uJ, and the laser output pulse width is less than 120fs. The beam control system includes an energy adjustment element combined by a polarizer 2 and a half w...

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Abstract

An ultra-short pulse laser micromachining technology for preparing F-P sensor of optical fiber features that the ultra-short pulse laser beam is fully reflected by a full-reflecting mirror, then focused by a focusing system and finally used to machine an F-P cavity on an optical fiber to generate an F-P sensor, and the machined image and it position on optical fiber are reflected via a half-mirror to a CCD camera and then transmitted to a monitor. Its apparatus is also disclosed.

Description

technical field [0001] The invention relates to a laser micromachining method and equipment, in particular to an ultrashort pulse laser micromachining method and equipment. Background technique [0002] In recent years, the rapid development of fiber optic smart structure research is a multidisciplinary comprehensive research field integrating fiber optic sensing, material science, mechanical manufacturing, electronics and control, and aerospace technology. It has broad application prospects in future new aircraft, space warfare, construction and water conservancy. Optical fiber sensing technology is an important part of it. Optical sensors have high sensitivity and large dynamic range, so they cannot be replaced by other types of sensors in smart structures. [0003] Among them, the fiber optic Fabry-Perot (F-P) sensor is one of the most promising sensors in the smart structure. Compared with other types of fiber optic sensors, the advantages of the F-P sensor are high-pr...

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Application Information

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IPC IPC(8): B23K26/04B23K26/06B23K26/42B23K26/08B23K26/0622B23K26/70
Inventor 程光华王屹山赵卫陈国夫李明张慧星
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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