The invention discloses a differential type
graphene resonant beam acceleration sensor comprising a substrate (1), a sensitive
mass plate (2), a first insulating layer (3), a second insulating layer (4), a first excitation
electrode pair (1), a first
graphene resonant beam (6), a second
graphene resonant beam (7), a third insulating layer (8), a second excitation
electrode pair (1) and a vacuum cap (10). The differential type graphene resonant beam acceleration sensor of the invention adopts a direct sensitive acceleration mode: a sensitive
mass block directly senses the measured accelerated speed, transforms the measured accelerated speed into a concentrated force to cause the
axial displacement of the sensitive
mass block and cause the change of the axial stress of the graphene
resonator beams, thereby causing the changes of the resonant frequency of the beams. Through detection of the resonant frequency of the beams, measurement of the accelerated speed can be realized. The two graphene resonant beams positioned in the axial direction of the sensitive mass block work in a differential mode in the detected acceleration direction so as to enhance detection signals, raise the sensitivity and the measurement accuracy and suppress conjugate interferences.