A differential type graphene resonant beam acceleration sensor

Abstract

The invention discloses a differential type graphene resonant beam acceleration sensor comprising a substrate (1), a sensitive mass plate (2), a first insulating layer (3), a second insulating layer (4), a first excitation electrode pair (1), a first graphene resonant beam (6), a second graphene resonant beam (7), a third insulating layer (8), a second excitation electrode pair (1) and a vacuum cap (10). The differential type graphene resonant beam acceleration sensor of the invention adopts a direct sensitive acceleration mode: a sensitive mass block directly senses the measured accelerated speed, transforms the measured accelerated speed into a concentrated force to cause the axial displacement of the sensitive mass block and cause the change of the axial stress of the graphene resonator beams, thereby causing the changes of the resonant frequency of the beams. Through detection of the resonant frequency of the beams, measurement of the accelerated speed can be realized. The two graphene resonant beams positioned in the axial direction of the sensitive mass block work in a differential mode in the detected acceleration direction so as to enhance detection signals, raise the sensitivity and the measurement accuracy and suppress conjugate interferences.

Description

technical field [0001] The invention belongs to the technical field of micro / nano electromechanical systems, and relates to a differential graphene resonant beam acceleration sensitive structure and an acceleration sensor. Background technique [0002] Based on mechanical resonance technology, the sensor realized by the inherent resonance characteristics of the resonant element with the change rule of the measured is called a resonant sensor. The resonant sensor itself is a periodic signal output (quasi-digital signal), which can be converted into a digital signal that is easy for the microprocessor to receive with only a simple digital circuit (not A / D); at the same time, due to the repeatability and resolution of the resonant sensitive unit The force and stability are very good, so the principle of resonance measurement has naturally become the focus of people's research today. [0003] The resonant acceleration sensor measures the acceleration by using the change of the ...

AI Technical Summary

Problems solved by technology

[0005] For resonant acceleration sensors, the change of resonant frequency caused by off-axis crosstalk not only affects the measurement accuracy and sensitivity of the sensor, but also affects the working stability of the sensor

In addition, in order to improve the sensitivity of acceleration measurement, most of the current methods need to redesign the resonant sensitive structure, which also greatly increases the design cost and production cycle