Fabrication method for electro-optical tuning whispering gallery mode microcavity of integrated electrode

Abstract

A method for fabricating an electro-optical tuning whispering gallery mode microcavity of an integrated electrode by a femtosecond laser microprocessing technology comprises the steps of helping to induce electrode chemical plating by a femtosecond laser, etching a microcavity structure by the femtosecond laser, grinding focused ion beam and performing chemical corrosion. In the three-dimensional whispering gallery mode optical microcavity fabricated according to the method, continuous total internal reflection of light is achieved by the ratio between refractive indexes of a cavity and an external environment, the three-dimensional whispering gallery mode optical microcavity has extremely high surface smoothness, and a small mode size and a high quality factor (larger than 10<5>) are supported; and meanwhile, accurate control on an electric field around the microcavity can be achieved by a transversely-integrated electrode, continuous adjustment of the refractive indexes is achieved by an electro-optical effect of a cavity material, and the purpose of mode cavity tuning in a whispering gallery mode is further achieved. The method is applicable to various dielectric thin film materials with electro-optical effects.

Description

technical field [0001] The invention relates to femtosecond laser processing, in particular to a method for preparing integrated electrode electro-optic tuning whispering gallery mode optical microcavities by femtosecond laser microprocessing technology. The method is applicable to various dielectric film materials with electro-optic effect. Background technique [0002] The optical microcavity of the whispering gallery mode realizes continuous total internal reflection of light through the high refractive index ratio of the cavity and the surrounding environment, confines the light field to a small volume for a long time, has a high quality factor, and effectively enhances light and matter. interaction. The realization of cavity mode tunable function has greatly expanded the application prospects of optical microcavities in frontier fields such as quantum optics, cavity quantum electrodynamics, information optics, and nonlinear optics. [0003] The current common cavity m...

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Problems solved by technology

[0005] The technical problem to be solved by the present invention is to overcome the shortcomings of the existing electro-optic modulatorable microcavity and the surrounding environment, such as low refractive index ratio, low quality factor, cumbersome preparation process, etc. A three-dimensional electrode and an optical whispering gallery mode microcavity, and a method for realizing independent electro-optical tuning of the mode, the distribution area of ​​the three-dimensional optical whispering gallery mode microcavity mode prepared by this method is directly in contact with the air, and has a high quality factor and modulation efficiency, said Dielectric film materials include various dielectric film materials with electro-optic effects

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