Dammann grating-based femtosecond laser parallel micromachining device with real-time monitoring function

Abstract

The invention relates to a dammann grating-based femtosecond laser parallel micromachining device with a real-time monitoring function. The device is characterized in that femtosecond laser parallel micromachining is performed on the basis of the beam splitting characteristic of the dammann grating, thus greatly increasing the efficiency of femtosecond laser machining; and a CCD detector is utilized to observe and monitor the machining process in real time. The invention has good application prospect in the aspect of femtosecond laser parallel micromachining.

Description

technical field [0001] The invention relates to femtosecond pulse laser micromachining, in particular to a femtosecond pulse laser parallel micromachining device with real-time monitoring. Background technique [0002] Femtosecond pulsed laser has femtosecond pulse duration, extremely high peak power and power density, so it has unique advantages such as extremely short action time in material microprocessing, and can induce various nonlinear effects. Since the femtosecond laser began to be used in material processing in 1995, it has attracted widespread attention due to its unique processing advantages. Femtosecond laser can process almost all materials such as metals, semiconductors and dielectrics. The characteristics of ultrashort pulse, high peak power and extremely small thermal effect area of ​​femtosecond laser make the indirect damage to the material processing surface small and the processing accuracy is high. , can be used to process and make metal mask plates, e...

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