Method for acquiring refractive index variation of transparent film in femtosecond laser micromachining

A technology of femtosecond laser processing and transparent thin film, which is applied in the direction of phase influence characteristic measurement, etc., can solve the problems of difficult precise positioning, large measurement area, and difficult precise positioning of the measured area, and achieve an easy-to-achieve effect

Active Publication Date: 2017-08-18
NINGBO UNIV
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Problems solved by technology

When using these methods to test the refractive index of thin films, the measurement area is relatively large, usually on the order of millimeters or more, and the precise positioning of the measured area is also difficult.
However, when using a femtosecond laser to control a transparent film,

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  • Method for acquiring refractive index variation of transparent film in femtosecond laser micromachining
  • Method for acquiring refractive index variation of transparent film in femtosecond laser micromachining
  • Method for acquiring refractive index variation of transparent film in femtosecond laser micromachining

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Embodiment 1

[0014] Embodiment one: if figure 1 As shown, the femtosecond laser processing equipment includes a laser 1 for emitting a processing beam, a laser power tuning mechanism 2, a shutter 3, a first polarization beam splitter prism 4, a total reflection mirror 5, and a laser beam diameter adjustment system arranged in sequence along the main optical path 6. The second polarizing beamsplitter prism 7, objective lens 8, and a three-dimensional mobile platform 9 for placing samples, and the laser power tuning mechanism 2 are composed of a first polarizer 21, a wave plate 22 and a second polarizer 23, and the power tuning accuracy is 1μW, the laser beam diameter adjustment system 6 is composed of a group of lenses, the diameter of the laser beam emitted from the laser beam diameter adjustment system 6 is 5 mm, the numerical aperture of the objective lens 8 is 1.4, and the back of the three-dimensional mobile platform 9 is placed for background illumination of the sample An LED light so...

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Abstract

The invention discloses a method for acquiring the refractive index variation of a transparent film in femtosecond laser micromachining. According to the method, 64 areas which are related to laser power and platform scanning speed and have a size of 80 mu m*80 mu m and variation of the refractive index can be obtained by utilizing a laser plane processing device and adopting a method for scanning line by line at an interval of 300nm, the transmission spectrum of the 64 areas can be detected by a Fourier infrared spectrometer with a microscopic system and a three-dimensional mobile platform, and the refractive index of the film can be calculated from the transmission spectrum by adopting an improved Swanepoel method, so that the refractive index variation of a film in the laser processing area can be obtained.

Description

technical field [0001] The invention relates to a method for obtaining the amount of change in the refractive index of a transparent thin film in femtosecond laser processing, in particular to a method for obtaining the change in the refractive index of a small region (80 μm×80 μm) of the thin film caused by the femtosecond laser. Background technique [0002] The change of refractive index of transparent thin film controlled by femtosecond laser is based on nonlinear interaction. It has small thermal effect, high precision and true three-dimensional processing capability. It is widely used in optofluidic chips, three-dimensional photonic crystals, infrared microcavity lasers and high-density optical storage devices. field of preparation. Micro-nano devices such as optical waveguides and gratings for single-photon chips can be prepared by using the principle of changing the refractive index of femtosecond photo-induced transparent films. Mastering the relationship between f...

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Application Information

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IPC IPC(8): G01N21/45G01N21/41
Inventor 宋宝安金友良王红阳张培晴林常规戴世勋聂秋华
Owner NINGBO UNIV
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