829results about How to "Precise structure" patented technology

A substance including tungsten and carbon is etched by using plasma. The plasma is generated from a mixed gas of a gas including a fluorine atom, a gas including a nitrogen atom and a gas including a hydrocarbon molecule.

Hybrid metrology apparatus (1000, 1100, 1200, 1300, 1400) measures a structure (T) manufactured by lithography. An EUV metrology apparatus (244, IL1/DET1) irradiates the structure with EUV radiation and detects a first spectrum from the structure. Another metrology apparatus (240, IL2/DET2) irradiates the structure with second radiation comprising EUV radiation or longer-wavelength radiation and detects a second spectrum. Using the detected first spectrum and the detected second spectrum together, a processor (MPU) determines a property (CD/OV) of the structure. The spectra can be combined in various ways. For example, the first detected spectrum can be used to control one or more parameters of illumination and/or detection used to capture the second spectrum, or vice versa. The first spectrum can be used to distinguish properties of different layers (T1, T2) in the structure. First and second radiation sources (SRC1, SRC2) may share a common drive laser (LAS).

A vertical type power MOSFET remarkably reduces its ON-resistance per area. A substantial groove formation in which a gate structure is constituted is performed beforehand utilizing the LOCOS method before the formation of a p-type base layer and an n+-type source layer. The p-type base layer and the n+-type source layer are then formed by double diffusion in a manner of self-alignment with respect to a LOCOS oxide film, simultaneously with which channels are set at sidewall portions of the LOCOS oxide film. Thereafter the LOCOS oxide film is removed to provide a U-groove so as to constitute the gate structure. Namely, the channels are set by the double diffusion of the manner of self-alignment with respect to the LOCOS oxide film, so that the channels, which are set at the sidewall portions at both sides of the groove, provide a structure of exact bilateral symmetry, there is no positional deviation of the U-groove with respect to the base layer end, and the length of the bottom face of the U-groove can be made minimally short. Therefore, the unit cell size is greatly reduced, and the ON-resistance per area is greatly decreased.

The invention discloses amphiphobic fluoro-containing crosslinkable block copolymer and a preparation method and application thereof. The block copolymer can be used for preparing a super-amphiphobic coating on the surface of glass or printing paper, and the super-amphiphobic coating is prepared by the following steps of: (1) putting silica nano spheres into benzotrifluoride to obtain solution ofsilica nano spheres; (2) adding solution of amphiphobic fluoro-containing crosslinkable block copolymer, tetrahydrofuran, hydochloric acid solution and water into the solution of silica nano spheres,and reacting for 7 to 12 hours to obtain a crude product of modified silica nano spheres; (3) washing the crude product of modified silica nano spheres to obtain modified silica nano spheres; and (4)dispersing the modified silica nano spheres into the benzotrifluoride to obtain solution, dripping the solution onto a glass sheet, and after the solvent is volatilized, forming the super-amphiphobiccoating on the surface of the glass sheet, or soaking the printing paper in the solution, taking the paper out, and drying the paper to obtain the super-amphiphobic coating on the surface of the paper. The amphiphobic fluoro-containing crosslinkable block copolymer can endow a material with good superhydrophobic and oleophobic properties; and the coating has high stability and hardly falls off and denatures.

A method of manufacturing a floating structure capable of providing increased device yield. The method includes: a) forming an insulation film, a predetermined area of which is removed, between a first substrate and a second substrate; and b) forming a floating structure in the removed predetermined area.

The extrusion apparatus for preparing superfine crystal block material has one structure comprising a die holder, a connecting seat, a conic die case, a conic die core, a wedged extruding rod with reduced extrusion force to avoid cracking of the block, a turning unit, a square vertical channel, a square horizontal channel and a product outlet. The product has high crystal grain fining and smooth surface, and the extrusion apparatus has simple structure, excellent mechanical performance, easy installation and use, and no pollution.

The present invention relates to a sole having a tilt surface, and to a knee joint-protecting shoe including same, and more particularly, to a sole having a tilt surface in which the tilt surface formed at the sole of a shoe enables the foot of a wearer to be inclined or slipped, inwardly or outwardly, in order to correct abnormality in the lower skeletal extremity, and uniformly distribute load on the knee joint of the wearer to prevent degenerative knee arthritis and alleviate pain, and to a knee joint-protecting shoe including the outsole. The present invention further comprises a sole having a tilt surface for attachment to the bottom surface of a shoe, wherein the outsole has a top surface and a bottom surface formed parallel to each other, a tilt structure including an upper member and a lower member defined by a tilt surface formed in the widthwise direction, and deformable members arranged at predetermined intervals from both front and rear ends of the shoe in a lengthwise direction to generate shear deformation in a tilted direction between the upper member and the lower member.

The invention relates to a comprehensive measuring device of static and dynamic rigidity of a ball screw. The comprehensive measuring device comprises a base plate, a linear feeding mechanism, a torque static and dynamic rigidity measuring mechanism, an axial static and dynamic rigidity measuring mechanism and a transverse static and dynamic rigidity measuring mechanism. The linear feeding mechanism comprises a servo motor, a torque sensor, a ball screw and a lead screw nut base. The torque static and dynamic rigidity measuring mechanism comprises two angle plates, two flanges, two circular gratings and two circular grating reading heads. The axial static and dynamic rigidity measuring mechanism comprises an electric cylinder, two connecting plates, two guiding rods, two springs and two tension-compression sensors. The transverse static and dynamic rigidity measuring mechanism comprises a linear guide rail, a sliding block, an electric cylinder, two pressure sensors, two universal balls, a first cardan, a connecting sleeve, a linear bearing, a sliding rod, an elastic box and a linear measuring block. The comprehensive measuring device can be used for torsional, axial and transverse static and dynamic rigidity measuring of the ball screw.

The invention discloses a crowd counting method and a system based on a scale pyramid neural network, wherein the scale pyramid neural network structure is composed of VGG-16 as the basic skeleton, and multi-scale high-level features are extracted by embedding a scale pyramid module in the high-level. The scale pyramid module consists of four parallel cavities with different expansion ratios. Themethod comprises steps: inputting a picture to network, after a series of convolution, getting high-level features and transfering them to scale pyramid module, generating four kinds of feature maps,these four kinds of feature maps and the feature maps input to the module being in the 'channel' dimension series connection, transfering to the next convolution layer, and finally getting the densitymap through the convolution of 1*1. Compared with the prior art, the method of the invention has more efficient, more accurate and simpler network structure, and can apply modules for handling multi-scale problems to deep networks.

The invention discloses a composite light guide plate structure and a high-efficiency production method for fabricating the light guide plate structure. The production method is characterized in that a flexible light guide thin film is compounded with a substrate layer, the composite light guide plate includes a double-layer or three-layer structure, and light guide grid dots are distributed on the lower surface or on the upper and the lower surfaces of the composite structure, wherein the flexible light guide thin film is produced by advanced reel-to-reel micro-nano imprint and is compounded with the substrate layer through a transparent viscous substance. The invention can greatly improve the production efficiency, and the grid dots manufactured by reel-to-reel micro-nano imprint have the advantage of high consistency, thus ensuring the performance stability of the light guide plate. The invention is particularly applicable for large-size backlight module and has the advantage of low cost. Meanwhile, the invention belongs to environment-friendly manufacture method due to no organic solve discharge in the screen printing process.

The invention discloses an ecological energy-saving and environment-friendly sustainable plant growing system. The plant growing system is characterized by comprising a water storage and supply module (1), a permeable isolating unit (2), a nutrient soil layer (4) and a drip irrigation system (3), wherein a single or a plurality of water storage and supply modules (1) form a plant growing base, the plant growing base is arranged on a roof or a soilless foundation, and the water storage and supply module (1) consists of an upper module and a lower module which are connected by splicing; the permeable isolating unit (2) is placed on the plant growing base, namely the upper part of the water storage and supply module (1); the nutrient soil layer (4) is encircled on the upper part of the permeable isolating unit (2); and the drip irrigation system (3) is arranged in the nutrient soil layer (4). The plant growing system is simple in structure and convenient to manufacture, and does not needmanual irrigation and maintenance under normal conditions.

A cutting device for use with installation of helical ground anchors designed to cut through rock. The invention has carbide steel cutting tips attached to the distal end of a shaft extending below the end in order to make a first cut through rock along the axis of rotation of the shaft. Helically shaped plates are attached to the shaft at a distance above the shaft set of cutting tips. Attached along the outer edge of the helix are additional carbide steel cutting tips that extend below the bottom surface of the helix and cut along the axis of rotation of the shaft. The present invention allows for the installation of helical ground anchor supports at proper depths without deviation, in situations where the path is obstructed by rock or other hard materials.

The invention relates to a device for testing nozzle characteristics. The device comprises a testing device box, a nozzle, a testing platform system, a gas channel system, a water channel system and a laser imaging system. The device is used for testing aerial fog characteristics such as the drop grain diameters, the drop speed, the flow density at the different positions and drop grain diameter distribution of the different nozzles at different spraying heights at different air pressures and different water pressures. The device is high in testing accuracy, wide in adjusting scope, stable in operation and capable of testing the aerial fog characteristics of single-phase liquid flow and gas liquid two-phase flow.

The invention relates to an optical parameter detection method of low-radiation coated glass, wherein the low-radiation coated glass is SnO2:F/SiCxOy, 0<x<1, and 1<y<4. The invention belongs to a coated glass detection field. On basis of obtaining a spectroscopic ellipsometry of SnO2:F/SiCxOy energy saving coated glass, the method introduces a five-layer film structure and an optical dispersion equation, returns an actually-measured spectroscopic ellipsometry by iteration, and finally obtains a film structure of the SnO2:F/SiCxOy coated glass and optical parameters of each layer. By the method, on-line real time monitor of optical performances of the coated glass can be implemented. The method can obtain an accurate film structure and the optical parameters only by optical test means, has advantages of no damage on a sample, small time consuming for measuring, simple measuring method, and no special requirement on a sample surface to be measured, and is very suitable for performance detection of the SnO2:F/SiCxOy energy saving coated glass.

The invention discloses a balance adjustment device for oil pumping machine and balanced structure adjustment method of oil pumping machine, by which the balanced structure adjustment is changed from using indirect parameter-electric current to using direct parameter-displacement, so that the adjustment is accurate and rapid, and the energy is remarkably saved. The invention also discloses an oil extraction control device, a color power indicator, an oil extraction measurement meter, an oil extraction integrated protection device, an oil extraction integrated testing and diagnosis control device, and a data acquisition and transmission unit for an oil extraction measurement and control system. The color power indicator provides a novel mean and method for diagnosis of oil pumping machine, which remarkably improves the effectiveness of diagnosis. The oil extraction integrated diagnosis control device and the data acquisition and transmission unit for the oil extraction measurement and control system have the advantages of high degree of automation, more monitored and controlled parameters, and large protection range; can perform onsite automatic acquisition and control and can perform long-distance automatic acquisition and control in management center; and provides a fundamental mean with high feasibility for realizing automated management of the full oil field.

A method and apparatus for enhancing image contrast between resist-covered and bare silicon regions of a wafer, applicable to Edge Bead Removal inspection. The wafer is illuminated separately by s-polarized light and p-polarized light impinging at near the Brewster angle of silicon or resist, and an image difference between the reflected s-polarized light and the reflected p-polarized light is derived.

The invention provides a method for preparing 2, 2'-biphenyl diphenol derivatives, and the method comprises the step of carrying out oxidation coupling reaction on phenolic compound A with ortho-hydrogen atoms at 0-100DEG C with the help of peroxide, thus preparing 2, 2'-biphenyl diphenol compound B; and the method is simpler and more economical, the post processing is simple and easy to implement and has good universality, and the method can provide a series of 2, 2'-catechol derivatives.

The invention discloses a three-dimensional calibration device for a curve flexible touch sensor array, which comprises a three-dimensional guide rail robot, a three-dimensional force loading mechanism, an array platform and a control part electrically connected with the array platform, wherein the three-dimensional guide rail robot comprises an X axis guide rail, a Y axis guide rail and a Z axis guide rail, each of which is provided with a grating ruler having a position detection function; the three-dimensional force loading mechanism is arranged at the lower end of the Z axis guide rail through an installing flange of a parallel mechanism; the three-dimensional force loading mechanism comprises the parallel mechanism and a three-dimensional force detecting part; and the three-dimensional force detecting part is arranged at the operation tail end of the parallel mechanism. The device is used for realizing the accurate positioning by driving the three-dimensional guide rail robot to drive the three-dimensional force loading mechanism to perform spatial positioning and matching with the closed loop position control of the grating ruler. The parallel mechanism is used for adjusting the posture of a three-dimensional force loading head. When three-dimensional force detected by a standard three-dimensional touch sensor reaches a preset value, a measuring value and a corresponding matrix position coordinate of a sensor sampling circuit are outputted.

The invention discloses an intelligent monitoring and mobile phone App (Application) displaying system and an intelligent monitoring and mobile phone App displaying method for indoor fitness equipment based on an Internet of Things. The system comprises an Internet of Things implementing system, a body builder Internet of Things intelligent box, a body builder cloud server and a mobile phone equestrian sports App; the system is characterized in that the body builder Internet of Things intelligent box is charged by a chargeable lithium battery, kinetic energy data is acquired by an electronic gyroscope, a self-making cloud calculation procedure is arranged in the body builder cloud server, and the body-building effect is displayed by the equestrian sports App by receiving signals in the intelligent box and body parameters of a user after the operation; the App is divided into two system editions, including an Android system and an Apple system, and the sports data and effects can be displayed in real time; furthermore, according to the system provided by the invention, an effect that the intelligent monitoring and acquisition of sports data of the indoor fitness equipment and the scientific estimation of the body building effect can be transmitted to the App in a mobile phone of a user can be realized.

A vertical power MOSFET, which can improve a surge withstand voltage and a surge withstand voltage against a surge voltage from an inductance load L. The vertical power MOSFET has a plurality of unit cells. The unit cell is formed from a MOSFET that uses a p-type base layer at a sidewall of a rectangular U-groove as a channel portion. Each of the p-type base layer of each unit cell is connected each others Accordingly, it can restrain an impurity concentration of a corner portion (a portion positioned at a corner) of the rectangular p-type base layer from being decreased. Therefore, it can reduce the difference in distance from the end portion of the p-type base layer to the end portion of the depletion layer. As a result, it can improve the surge withstand voltage when a surge voltage is input from an inductance load L.