The invention provides an improvement process of a
solar cell P-N junction, a PERC
cell and a manufacturing method of the PERC
cell, and the improvement process comprises the steps: firstly removing a PSG layer after a
silicon wafer is used for manufacturing a selective emitter, and then carrying out the oxidation growth of an oxidation
protection layer, thereby enabling a
dead layer on the surface of the P-N junction to be thinned, improving and optimizing the P-N junction, and improving the performance of the PERC
cell. And recombination of diffused photoelectrons on the surface of the cell is effectively reduced. According to the manufacturing method, on the basis of the improved technology, secondary cleaning is carried out to remove the oxidation winding plating layer on the back face, the oxidation
protection layer on the front face is reserved, and then the subsequent
coating procedure and the subsequent
electrode procedure are carried out. A
diffusion oxide layer removing process is formed by firstly removing a PSG layer, then oxidizing and carrying out secondary cleaning, and finally, the
photoelectric efficiency of the surface is improved. According to the secondary cleaning, not only is the oxidized winding plating layer on the back removed, but also the existing
pollution of the battery piece can be cleaned before
film coating, and the reworking procedure of the battery piece does not need to be additionally added.