An interferometer etalon for optical detection

Abstract

The invention relates to the technical field of optical precision detection, and specifically discloses an interferometer etalon for optical detection. The etalon includes three sets of mirror groups, the mirror groups are concave mirror group, convex mirror group and wedge mirror group, the concave mirror group is used to diverge light, the convex mirror group is used to gather light, and the wedge mirror group is used to deflect light. Mirror groups are stacked, and the mirror groups are detachably connected. The invention adopts a small number of optical elements to realize the integration of the etalon, so that the structure is simplified, the detachable connection is adopted, which is convenient for replacement, and the lens group and the lens barrel are connected by glue to ensure the image quality requirements.

Description

technical field [0001] The invention relates to the technical field of optical precision detection, and specifically discloses an interferometer etalon for optical detection. Background technique [0002] At present, the most commonly used method in the field of optical inspection is to use interferometers to measure the radius of curvature and surface shape of optical components. The aperture requirements for detecting light are also different. [0003] When different calibers of detection light are required, the conventional practice in the field of optical detection is to purchase interferometer etalons of corresponding calibers from interferometer manufacturers, and cooperate with the interferometer to detect optical components. However, due to the limited application occasions and the cost of purchasing etalons, the R&D cost of a product remains high, which also limits the purchase of other necessary optical processing and testing equipment. [0004] In the interferom...

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Problems solved by technology

However, due to the limited application occasions and the cost of purchasing etalons, the cost of research and development of a product remains high, and it also limits the purchase of other necessary optical processing and testing equipment

[0004] In the interferometer etalons usually designed, the structure is relatively loose, and one set of etalons can only achieve one purpose. If multiple changes to the optical path are required at the same time, multiple sets of etalons need to be stacked, which is bulky and inconvenient to connect , at the same time, structural instability is very likely to occur at the mechanical connection, so that the final measurement and detection results are seriously inconsistent with the expected value or wrong detection results are obtained

[0005] In traditional interferometer etalons, it usually includes multiple spherical lenses, or aspheric surfaces but all of them are rotary elements. Due to the inconvenience of processing and installing wedge-shaped optical elements, they are rarely used in etalons.

If it is necessary to deflect the outgoing light to a certain extent, an additional wedge-shaped plate mirror group is added, which is even more inconvenient for the overall installation and use of the etalon

[0006] In the commonly designed interferometer etalon, due to the small beam aperture, the connection between the lens and the frame is generally adopted by the threaded pressure ring, but the threaded connection is prone to loosening during use, which is very unfavorable to the stability of the etalon. At the same time, the processing of the thread cannot guarantee the flatness of the positioning end face of the pressure ring, which has a great influence on the surface shape of the lens in the etalon, and then has a great influence on the measurement or detection results.

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